MODEL ESA DRY VACUUM PUMPS FOR SPECIAL APPLICATIONS

HIGH PUMPING SPEED, COMPACT SIZE

The models ESA200W, ESA300W and ESA500W are the right choice for the rapid evacuation of large volume chambers as the load lock and transfer chambers in FPD and LCD process systems.

Features & Benefits:

  • Low Cost of Ownership [power, N2, water, footprint, volume, weight]
  • Variable pumping speed to match application requirements
  • State-of-the-art control and monitoring devices
  • Idle mode can be employed for increased utility savings
Model ESA300W, 400V

Technical Data

Model   ESA200W ESA300W ESA500W
Pumping speed (N2) at 50 Hz [m3/h] 1,200 1,680 3,000
  [l/min] 20,000 28,000 50,000
Pumping speed (N2) at 60 Hz [m3/h] 1,200 1,800 3,000
  [l/min] 20,000 30,000 50,000
Ultimate pressure at 50 Hz [mbar] 5.3 x 10E-3 5.3 x 10E-3 1.0 x 10E-2
  [Pa] 0.53 0.53 1.0
Ultimate pressure at 60 Hz [mbar] 5.3 x 10E-3 5.3 x 10E-3 1.0 x 10E-2
  [Pa] 0.53 0.53 1.0
Cooling water [l/min] 3.5 - 8 6 - 9 6 - 9
Nitrogen consumption [slm] 11 - 13 5 - 7 5 - 7
Voltages ranges [V] 200 - 220 / 380 - 440, 3-ph, 50/60 Hz 200 - 220 / 380 - 440, 3-ph, 50/60 Hz 200 - 220 / 380 - 440, 3-ph, 50/60 Hz
Power at ultimate pressure [kW] 3.2 (50 Hz), 3.4 (60 Hz) 6.6 (50 Hz), 7.3 (60 Hz) 6.7 (50 Hz)
Weight, approx. [kg] 420 700 750
Sizes (LxWxH) [mm] 970x400x907 1110x620x945 1110x620x1010
Inlet flange size DN 100 ISO-K 100 ISO-K 160 ISO-K
Outlet flange size DN 40 KF 40 KF 50 KF
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