Model EV-M Dry Vacuum Pumps

NEW INNOVATIVE PUMP DESIGN FOR HARSH PROCESSES

EBARA is launching a new vacuum pump design for harsh processes. The pumps have smaller dimensions and a 50% lower power consumption than the EST series. EV-M series have generally a higher H2 pumping speed compared to screw type vacuum pumps.

Customer Benefits:

  • Lowest power consumption: Decreased user's Cost of Ownership and reduced company's carbon emissions
  • Smaller weight and dimensions compared to earlier models: User friendly
  • Higher H2 pumping speed compared to screw type vacuum pumps
  • Flexible rotation speed and idle mode as standard: Further power saving

Technical Characteristics:

  • Multi-stage lobe design engineered for harsh application
  • Enhanced by-procuct capability
  • Enhanced reliability through high torque motors
  • Main pump and booster pump with energy saving DC motors
  • Intelligent control system
  • Low noise and low vibration
  • Adjustable pumping speed by RPM variation
  • Very small footprint
  • Low consumption of electrical power, cooling water and nitrogen
  • Idle mode for additional energy savings

Technical Data

Model   EV-M20N EV-M102N EV-M202N EV-M302N EV-M502N EV-M802N
Pumping speed (N2) [m3/h] 108 600 1,200 1,620 3,000 4,800
  [l/min] 1,800 10,000 20,000 30,000 50,000 80,000
Ultimate pressure [mbar] 5 x 10E-2 5 x 10E-3 5 x 10E-3 5 x 10E-3 5 x 10E-3 5 x 10E-3
  [Pa] 5 0.5 0.5 0.5 0.5 0.5
Cooling water [l/min] 3 - 8 3 - 8 3.5 - 8 4 - 8 5 - 8 5 - 8
Nitrogen [slm] 15 - 18 15 - 18 15 - 18 15 - 18 16 - 20 16 - 20
Voltages ranges [V] 200 - 220 / 380 - 440, 3-ph, 50/60 Hz 200 - 220 / 380 - 440, 3-ph, 50/60 Hz 200 - 220 / 380 - 440, 3-ph, 50/60 Hz 200 - 220 / 380 - 440, 3-ph, 50/60 Hz 200 - 220 / 380 - 440, 3-ph, 50/60 Hz  
Maximum power [kW] 2.2 3.8 4.4 4.7 5,7 5.4
Power at ultimate pressure [kW] 1.2 1.8 1.9 2.5 2.1 2.8
Weight, approx. [kg] 170 320 360 400 500 740
Sizes (LxWxH), 400 V version [mm] 820x370x620 810x380x922 870x380x922 961x380x1,000 1,015x485x1,040 1,140x630x1,105
Sizes (LxWxH), 208 V version [mm] 820x370x525 810x380x827 870x380x827 961x380x905 1,015x485x945 1,140x630x1.105
Inlet flange size DN 40 KF 100 ISO-K 100 ISO-K 100 ISO-K 160 ISO-K 200 ISO-K
Outlet flange size DN 40 KF 40 KF 40 KF 40 KF 40 KF 40 KF
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