Model PDV Dry Vacuum Pumps

PORTABLE DRY VACUUM

Provides for a clean, reliable vacuum for today’s high tech manufacturing, semiconductor, thin film, photovoltaic, biomedical and pharmaceutical industries. The PDV Series Dry Vacuum Pumps offers an oil free energy efficient solution for replacing scroll and oil pumps for clean applications. The PDV Series Dry Vacuum Pumps require no annual maintenance and offers a low cost of ownership and higher return on investment (ROI). The serial communication allows both remote monitoring and control to the PDV Series Dry Vacuum Pumps.

Customer Benefits:

  • Oil Free - No hydrocarbon issue in the sys
  • Innovative frictionless design - No particulate generation
  • Low noise level - User friendly
  • Lowest ultimate pressure in its class - Best vacuum for money
  • Air cooled - No cooling water required
  • Non-contact rotor, no sealing exchange - Long-lasting until maintenance required
  • Highly reliable due to EBARA's experience - Long lifetime

Applications:

  • Physical and chemical science
  • Electron microscopes
  • Mass spectrometers
  • Surface analysis
  • Leak detection systems
  • Backing pumps for turbo pumps
  • RGA
  • Load lock vacuum
  • etc.

Tell us your application and we will tell you if the PDV will work.

Technical Data

Model   PDV250-GB PDV500-GB
Pumping speed (N2) [m3/h] 13.8 30
  [l/min] 230 500
Pumping speed with gas ballast (N2) [m3/h] 12 25.8
  [l/min] 200 430
Ultimate pressure [mbar] 5 x 10E-3 5 x 10E-3
  [Pa] 0.5 0.5
Ultimate pressure with gas ballast [mbar] 2 x 10E-2 2 x 10E-2
  [Pa] 2 2
Voltage range [V] 100 - 240 V, 50/60 Hz, single phase 100 - 240 V, 50/60 Hz, single phase
Power at ultimate pressure [W] 240 270
Weight, approx. [kg] 15 20
Sizes (LxWxH) [mm] 442 x 168 x 278 467 x 185 x 310
Inlet flange size DN 25 KF 40 KF
Outlet flange size DN 25 KF 25 KF
Noise Level [dB(A)] 58 58
Media   Air, clean gas not suitable for toxic, corrosive, explosive or
particulate forming gases.
Air, clean gas not suitable for toxic, corrosive, explosive or
particulate forming gases.
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