EBARA is a leading supplier of specialty products for the Compound Semiconductor Industry. The technology is based on metalorganic compounds with elements from different groups of the periodic table, e.g. GaN, GaAs, InP, SiC. These play a key role in many of today’s fastest growing market segments, such as LEDs for FPD backlighting, solid state lighting, traffic lighting, or high performance lasers for blue ray discs or industrial applications. Future markets are in the area of General Lighting, Photovoltaic and OLED.
Most of the above applications employ sophisticated processes, such as Metal Organic Chemical Vapour Deposition (MOCVD), Molecular Beam Epitaxy (MBE) and Hydride Vapour Phase Epitaxy (HVPE).
EBARA has specially designed Dry Vacuum Pumps for above processes, which feature a high content of H2 carrier gas. Thanks to the 3-lobe and multi-stage Roots design, EBARA dry vacuum pumps are specially suited to prevent back streaming of H2. The ESA25-D with 150 m3/h and the ESA70W-D with 420 m3/h pumping speed are the pumps of choice for MOCVD and OLED processes. Both pump types come with a dual voltage motor suited for 208V and 400V. |
EBARA´s GDC250 and G5 Point-of-use Burner Washers abate a a wide range of waste gases incl. PFCs with the highest destruction efficiency in the industry. The total waste capacity is 250 slm (GDC250) resp. 350 slm (G5) including nitrogen purge from vacuum pumps. Built in features such as the automatic scraper minimize downtime for maintenance. The GDC and G5 scrubbers have distinct advantages regarding Cost of Ownership and abatement efficiency for many LED processes, such as Oxide Etch, CVD and in cases that PFC gases are used.
The Airgard Cyclone Gas Scrubber is the tool of choice for many epitaxial processes involved in the production of LED. The Airgard scrubber with a max. flow of 600 slm features extremely low downtime and cost of ownership, based on the experience with more than 1.000 units working in the field.
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