Model EBT Turbomolecular Pumps
EBARA's Ceramic Bearing Turbo Pumps
The EBT Series are mechanical bearing compound turbomolecular pumps which compliment EBARA’s existing line of EMT MagLev turbomolecular pumps. The EBT series are highly efficient, cost effective solutions to your high vacuum pumping requirements. EBARA’s EBT Series compound turbomolecular pumps offer an extremely rugged mechanical bearing design which provides clean, reliable vacuum generation for today’s high tech manufacturing. Typical applications include semiconductor, thin film, photovoltaic and analytical instruments.
EBARA’s EBT Series compound turbomolecular pumps can be mounted in any orientation and are ideal for mobile applications. These pumps offer high pumping speed and high light gas compression, making them ideal for UHV and analytical systems. The EBT70F and EBT240F pumps are available with an optional integrated controller. All EBARA EBT Series compound turbomolecular pumps as available with either water or fan cooling, and the EBT70F is available with convection cooling.
- Durable structure for Air Inrush
- Installation in any orientation
- High throughput
- Compact size
- Vibration free
- Air or water cooled
- Safety Standards CE, UL, SEMI, NRTL