Model EBT Turbomolecular Pumps

EBARA's Ceramic Bearing Turbo Pumps

The EBT Series are mechanical bearing compound turbomolecular pumps which compliment EBARA’s existing line of EMT MagLev turbomolecular pumps. The EBT series are highly efficient, cost effective solutions to your high vacuum pumping requirements. EBARA’s EBT Series compound turbomolecular pumps offer an extremely rugged mechanical bearing design which provides clean, reliable vacuum generation for today’s high tech manufacturing. Typical applications include semiconductor, thin film, photovoltaic and analytical instruments.

EBARA’s EBT Series compound turbomolecular pumps can be mounted in any orientation and are ideal for mobile applications. These pumps offer high pumping speed and high light gas compression, making them ideal for UHV and analytical systems. The EBT70F and EBT240F pumps are available with an optional integrated controller. All EBARA EBT Series compound turbomolecular pumps as available with either water or fan cooling, and the EBT70F is available with convection cooling.

Technical Characteristics:

  • Durable structure for Air Inrush
  • Installation in any orientation
  • High throughput
  • Compact size
  • Vibration free
  • Air or water cooled
  • Safety Standards CE, UL, SEMI, NRTL

Technical Data

Model   EBT70F EBT220F EBT240F EBT350F EBT450F EBT800F EBT1100F EBT1400F EBT2400F
Max. pumping speed (N2) [l/s] 70 220 240 350 450 820 1,100 1,400 2,400
Max. pumping speed (H2) [l/s] 40 100 160 210 240 650 720 750 1,100
Max. compression ratio (N2)   1x10E8 1x10E8 1x10E8 1x10E8 1x10E8 1x10E8 1x10E8 1x10E8 1x10E8
Max. compression ratio (H2)   1x10E5 4x10E2 4x10E4 2x10E3 2x10E3 1x10E4 1x10E4 4.3x10E3 1.4x10E3
Ultimate pressure [mbar] <5x10E-9 <1 x 10E-8 <1 x 10E-8 <1 x 10E-8 <1 x 10E-8 <1 x 10E-8 <1 x 10E-8 <1 x 10E-8 <1 x 10E-8
  [Pa] <5x10E-7 <1 x 10E-6 <1 x 10E-6 <1 x 10E-6 <1 x 10E-6 <1 x 10E-6 <1 x 10E-6 <1 x 10E-6 <1 x 10E-6
Max. outlet pressure [mbar] 12 2.6 7 2.6 2.6 3.3 3.3 3.3 3.3
Inlet flange size DN 63ISO-K
63 CF
100 ISO-K
100 CF
100 ISO-K
100 CF
100 ISO-K
100 CF
150 ISO-F
160 CF
150 ISO-F
160 CF
200 ISO-F
200 CF
200 ISO-F
200 CF
250 ISO-F
Outlet flange size DN 25 KF 25 KF 25 KF 25 KF 25 KF 40 KF 40 KF 40 KF 40 KF
Weight w. ISO-F flange, approx. [kg] 3 5.5 7.3 6 7 27 27 29 45
Turbo controller   ETC76
or integr.
ETC223 ETC246 or
integr.
ETC353 ETC353 ETC1104 ETC1103 or
ETC1104
ETC1103 ETC2403
Voltages range [V] 24 DC 200 - 230, 1-ph, 50/60 Hz 200 - 230, 1-ph, 50/60 Hz 200 - 230, 1-ph, 50/60 Hz 200 - 230, 1-ph, 50/60 Hz 200 - 230, 1-ph, 50/60 Hz 200 - 230, 1-ph, 50/60 Hz 200 - 230, 1-ph, 50/60 Hz 200 - 230, 1-ph, 50/60 Hz
Options   Air or water cooled Air or water cooled Air or water cooled Air or water cooled Air or water cooled Air or water cooled Air or water cooled Air or water cooled Air or water cooled
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