OXYDATION SYSTEMS
ABATEMENT OF PYROPHORIC GASES
Pure Air Systems (PAS), a Phoenix Arizona/USA based company is represented from EBARA Precision Machinery in Europe. Pure Air is fully dedicated to help to preserve a cleaner environment, helping to clean the air we all breathe.
S.DOC SILANE OXIDATION SYSTEM
The unique S.DOC system (S.DOC = Silane Dynamic Oxidation Chamber) allows the abatement of pyrophoric gases as Silane or TMA (Trimethylaluminium) with unrivalled CoO advantage to customers. This goes hand in hand in combination with effective and proven DRE (Destruction and Removal Efficiency). There are almost no operation costs because ambient air is used as oxidant. The reaction product of Silane and ambient air is non-hazardous SiO2 dust which will be captured in a mechanical filter and easily disposed.
Customer Benefits S.DOC:
- Unrivalled CoO advantage
- Virtually no consumables needed
- Maintenance free
Technical Characteristics S.DOC:
- Controlled oxidation of pyrophoric gases
- No moving parts in the system
- Plunger available for inlet cleaning
- Ideal for gas combinations like SiH4, H2, PH3, B2H6
E.DOC-TH THERMAL OXIDATION SYSTEM
The latest development, E.DOC-TH, allows abating also non pyrophoric gases as NH3 in a 2-stage process. In the first stage, NH3 will be thermally decomposed with electrical heaters. In the second stage, SiH4 oxidized with ambient air, as described above.
The E.DOC-TH, unlike other thermal decomposition systems is not using burner gas to heat up the contaminated gas stream, but heats it up by radiation and conduction. Using moderate oxidation temperatures reduce NOx emission and virtually prevents CO2 formation since no combustion gas is needed.
Customer Benefits E.DOC-TH:
- No combustion gas needed
- No city water needed
- Improved CO2 balance
- Reduced NOx emission
Technical Characteristics E.DOC-TH:
- Electrically heated
- Effective oxidation of pyrophoric and non-pyrophoric gases
- Ideal for gas combinations like SiH4, NH3, H2, TMGa, TMIn, TMAl, TEGa
