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| · | Vacuum pump designed for rapid evacuation of huge gas loads | | · | High H2 pumping speed - ideal for PV applications | | · | High performance on load locks, transfer chambers with large volume and sputtering chambers | | · | Variable pumping speed to match application specific requirements | | · | Compact pump size | | · | Low Cost of Ownership |
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| Technical Characteristics |
| · | Multi-stage Roots pump design for application in clean and light duty processes | | · | High capacity main pump with RPM controllable booster pump integrated into one housing | | · | High pumping speed even in the high presure range close to atmosphere | | · | Intelligent control system | | · | Complete pump safeguard system | | · | High pump operating temperature preventing condensation | | · | Low noise and low vibration | | · | Very small footprint | | · | Low consumption of power, nitrogen and cooling water | | · | Idle mode for energy saving |
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| Max. pumping speed (N2) | at 50/60 Hz | 1,200 m3/h (20,000 l/min) | | Ultimate pressure | 5.3 x 10E-3 mbar (0.53 Pa) | | Cooling water requirements | 3.5 - 8 l/min | | Nitrogen consumption | 11 - 13 slm (17 - 20 Pa m3/s) | | in clean processes | 2.1 slm (3.8 Pa m3/s) | | Voltages ranges | 208 V / 400 V | | Power at ultimate pressure | 3.2 kW (50 Hz), 3.4 kW (60 Hz) | | Weight, approx. | 420 kg | | Sizes (LxWxH) | 970 x 400 x 907 mm | | Inlet flange size | DN 80 KF | | Outlet flange size | DN 40 KF |
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| Product | Ordering No. | Typ | | ESA200W | 816-0200-2-000 | Dry Vacuum Pump ESA200W, 208 V | | ESA200W | 816-0200-3-000 | Dry Vacuum Pump ESA200W, 400 V |
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