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| · | Lowest cost of ownership in its class | | · | Very compact pump size | | · | Variable pumping speed to match application requirements | | · | Small number of models covering the full range of required pumping speeds | | · | State-of-the-art control and monitoring devices | | · | Idle mode can be employed for increased utility savings |
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| Technical Characteristics |
| · | Multistage lobe design engineered for application in clean and medium harsh processes Load Lock, SEM, PVD, Ashing, Ion Implantation and Etch | | · | Pump with energy saving DC motor | | · | Intelligent control system | | · | Complete pump safeguard system | | · | High pump operating temperature preventing condensation | | · | Low noise and low vibration | | · | Thorougly corrosion resistant material | | · | Adjustable pumping speed by RPM variation | | · | Very small footprint | | · | Low consumption of power, cooling water and nitrogen | | · | Idle mode for additional energy savings |
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| Pumping speed (N2) 50/60 Hz | 90 - 180 m3/h
(1,500 - 3,000 l/min) | | Ultimate pressure 50/60 Hz | 6.7 x 10E-3 mbar
(6.7 Pa) | | Cooling water requirements | 2 - 8 l/min | Nitrogen Consumption
Clean applications
| 11 - 13 slm (19 - 22 Pa m3/s)
2 slm (3.4 Pa m3/h) | | Voltages ranges | 200 - 220 / 380 - 440 V | | Maximum power | 3.5 kW | | Power at ultimate pressure | 1.7 kW | | Weight, approx. | 190 kg | | Sizes (LxWxH) | 760 x 400 x 488 mm | | Inlet flange size | DN 50 KF | | Outlet flange size | DN 40 KF |
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| Product | Ordering No. | Typ | | ESR30N | 814-0030-2-0N0 | Vacuum Dry Pump ESR20, 208V, 50/60 Hz | | ESR30N | 814-0030-3-0N0 | Vacuum Dry Pump ESR20, 400V, 50/60 Hz |
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