Semiconductor, solar and LCD manufacturing processes produce hazardous solid by-products and waste gases. These processes produce a mixture of toxic, reactive, ignitable or corrosive gases. With the ever increasing stringency of environmental regulations hazardous gases need to be treated before being released onto the atmosphere or water systems.
EBARA offers a line of Point-of-Use Gas Abatement Systems capable of handling most processes in the microelectronics and photovoltaic industry. Our abatement product line includes wet, combustion, catalytic, dynamic oxidation and thermal technologies. All of EBARA’s abatement technologies are designed for low cost of ownership, high reliability and compliance to safety standards. | | Combustion systems:
EBARA GDC 250
EBARA G5 Wet scrubbers:
Airgard Cyclone Dynamic oxidation systems:
Pure Air Systems |
