Cyclone Details

Gas Inlet Device

Patent gas inlet devices minimize rate of restriction and automatic gas inlet plunger removes restrictions without process interruptions.

First Scrubbing Chamber
Coarse spray, high flow nozzle coats chamber and removes bulk impurities.

Pump
Corrosion resistant, high output and long life, recirculates 160 l/min.

Small Foot Print
83 cm x 62 cm.

Sump Geometry
Unique pump input, drain and fresh water input locations prevent foaming, sediment and minimize water use.

Fresh Water Input
Strategic position increases efficiency, minimizes water use and eliminates foam.

Packed Column
The final polish! Packing requires no maintenance or replacement.

Eductor Cone
Keeps exhaust line at slightly negative pressure (a nominal draw of 1-2" of water).

Technical Characteristics
·Zero scrubber related process tool downtime
·Max. flow rate of input gas is 600 slm
·>99.999% removal of water soluble gases
·Patented non-clogging gas inlet device
·Automatic inlet plunger
·High flow spray chambers
·Unique packed column design
·PLC based scrubber control box
·Dry contact tool interface / interlock
·"Standby mode" reduces water consumption to less than 1% of standard usage
Target - Applications/Gases
EPI Poly Etch/CVD Metal etch
Hydrogen Fluorosilanes Chlorine
Chlorosilanes Silicon Nitride Hydrogen Chloride
Hydrogen Chloride TEOS Boron Trichloride
  Ammonia  

Hydrogen Bromide  
 
Ordering Data
ProductOrdering No.Type
Airgard - Cyclonefor details please contact EBARA