Burner Washer GDC 250

Process Gas Abatement System GDC 250

EBARA's Burner Washer GDC250 (Gas Decomposition by Combustion) is a high efficient universal abatement system for abatement of the waste gases in the semiconductor, solar and thin films manufacturing. It is designed for the abatement of both CVD and etch gases. Global environmental regulations concerning PFC gases are becoming more and more stringent. The GDC250 is a unique abatement system equipped with a patented "rolling" burner reaching a temperature of 2,500°C. The GDC250 burner washer guarantees PFC abatement to an unprecedented low level. Even the most stable CF4 can be abated to a lower than 1 ppm. The total waste capacity is 250 slm including nitrogen purge from vacuum pumps.

The thermal decomposition in the flame is followed by a wet scrubbing of the burned products in a 2-stage water scrubber to retain the remaning particles and adsorb the water soluble gases.

A variety of options are available adding value for the customer as follows:

• Fan scrubber unit to remove paeticles from the
   gas stream
• Waste water pump for the positive drain (facility waste
   water line is above the system)
• Heater jackets for inlet lines to prevent condensation
   and blockages
• Air purge unit to keep exhaust line dry
• Fuel leak sensor

Special focus of design given on:


·	High efficient burner washer (e.g. >99% for PFCs) for low and high waste gas flows.
·	Highest standards of safety to eliminate any risks for operators and environment.
·	Lowest Cost of Ownership through low utility costs and by long maintenance intervals.
·	No risk of corrosion - all pipes are coated inside with corrosion resistant material. No neutralisation agent is necessary.
·	The system operates with city water, no water pre-conditioning is required.
·	Automatic scrapers for mechanical cleaning of reactor and burner prevent blockages allow cleaning without opening the system and reduce the preventive maintenance impact.
·	Three burning gases are possible: LNG, propane and hydrogen.
·	Best possible reduction of nitrogen oxides (NOx) by small amounts of purge gas necessary. That is especially true in combination with EBARA dry vacuum pumps with their small amounts of N2 purge required.
·	Various operation modes: high, low and idle operation mode allow to save utilities cost.

Technical Data

Maximum flow rate	250 slm
Inlet port	NW 40 x 4 ports (62 slm max. gas flow per port)
Dimensions in mm	900 (w) x 900 (d) x 1800 (h)
Weight	550 kg
Power supply	1.5 kVA (consumption: 0.8 kVA), single phase 230 VAC
Fuel type	GDC 250 SA: Natural gas - GDC 250 SP: Propane gas - GDC 250 SH: Hydrogen
Fuel*	GDC 250 SA: 14 [26] slm - GDC 250 SP: 6 [11] slm - GDC 250 SH: 35 [80] slm
Oxygen*	GDC 250 SA: 20 [58] slm - GDC 250 SP: 21 [55] slm - GDC 250 SH: 12 [40] slm
Dry air*	GDC 250 SA: 140 [100] slm - GDC 250 SP: 140 [100] slm - GDC 250 SH: 140 [100] slm
Nitrogen	38 slm (during operation), 100 slm (during shut down)
City water	9 l/min



* Values in brackets, [] show consumption when abating CF4.

Ordering Data

Product	Ordering No.	Type
GDC 250 SA	840-GDC2-2-SA0	Process Gas Abatement System GDC 250 SA
GDC 250 SP	840-GDC2-2-SP0	Process Gas Abatement System GDC 250 SP
GDC 250 SH	840-GDC2-2-SH0	Process Gas Abatement System GDC 250 SH