Technical Characteristics

S.DOC (Silane Dynamic Oxidation Chamber)
for pyrophoric gas treatment
·Utilizing dynamic oxidation and mechanical filtration
·Process flows up to 100 slm
·>99% silane destruction
·>99% solids collection
·Low airflow interlock to shut off or bypass gas inlet(s)
·Cabinet exhaust for secondary containment
·No cooling water, no fuel gas
·Smallest footprint
E.DOC-SC (Effluent Dynamic Oxidation Chamber - Scrubber System)
for toxic, pyrophoric and corrosive gas treatment
·Utilizing dynamic oxidation, mechanical filtration and water scrubbing
·Flexibility
·Innovative solids handling
·Minimal water usage
·Safety
·Maximum uptime
·Ease of maintenance
·Fully enclosed cabinet
E.DOC-TH (Effluent Dynamic Oxidation Chamber - Thermal System)
specifically designed to eliminate the PFCs used in today's applications
·Utilizing dynamic oxidation, thermal oxidation and water scrubbing
·Dual electric thermal unit, up to 1100 C
·Dual function water spray
·Reverse flow scrubber
·Central cleaning mechanism
·Ease of maintenance
·Minimal downtime
 
Ordering Data
ProductOrdering No.Type
S.DOCfor details please contact EBARA
E.DOC-SC
E.DOC-TH