EBARA's dry vacuum pumps range covers the following product lines: ESR dry vacuum pumps are constructed as multi-stage Roots pumps, employed in clean and medium harsh applications. EST dry vacuum pumps are engineered for harsh and powdery process applications. All models are 2-stage screw pumps, the models EST100WN and higher are backed with an additional Roots type pump. ESA dry vacuum pumps have been developed for clean processes and special applications as H2 rich processes or for the evacuation of high volume chambers. VOS dry vacuum pumps feature in a very small space requirement.
PDV dry vacuum pumps provide a clean, reliable vacuum for today's high tech manufacturing, semiconductor, thin film, photovoltaic, biomedical and pharmaceutical industries.
More information coming soon...
EV-S dry vacuum pumps:
EBARA has developed a new and more efficient pump design resulting in lower operating costs. | 