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| · | Very low nitrogen consumption for purging | | · | Clean room compatible | | · | Low service requirements | | · | Compact size and small footprint |
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| Technical Characteristics |
| · | Multi-stage Roots design engineered for application in clean and medium harsh processes | | · | Complete pump safeguard system | | · | High pump operating temperature preventing condensation | | · | Low noise and low vibration | | · | Corrosion resistant materials-stainless steel coolers, water circuits | | · | Efficient interstage coolers for LPCVD nitride process | | · | Canned motor | | · | Low service requirements | | · | Control panel for monitoring operating conditions |
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| Pumping speed (N2) 50/60 Hz | 42 / 50 m3/h
(700 / 833 l/min) | | Ultimate pressure 50/60 Hz | 1x10-2 / 1x10-2 mbar
(1.1 / 1.0 Pa) | | Water Consumption | 3.5 l/min | | Nitrogen Consumption | 9-11 slm
(15-19 Pa m3/s) | | Voltages ranges | 200-220/380-415 V | | Motor power, installed | 1.5 kW | | Weight, approx. | 150 kg | | Sizes (LxWxH) | 500x340x590 mm | | Inlet flange size | DN 40 KF | | Outlet flange size | DN 40 KF |
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| Product | Ordering No. | Typ | | A07V | 811-0007-2-000 | Dry Vacuum Pump A07V, 208 V, 50/60 Hz | | A07V-B | 811-0007-2-000 | Dry Vacuum Pump A07V-B, 208 V, 50/60 Hz, Basic Version | | A07V | 811-0007-3-000 | Dry Vacuum Pump A07V, 400 V, 50/60 Hz | | A07V-B | 811-0007-3-000 | Dry Vacuum Pump A07V-B, 400 V, 50/60 Hz, Basic Version |
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