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| · | Clean, reliable vacuum | | · | Compact size and small footprint | | · | Low noise and low vibration | | · | Very low nitrogen consumption for purging | | · | Clean room compatible | | · | Low service requirements |
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| Technical Characteristics |
| · | Multi-stage Roots design engineered for application in clean and medium harsh processes | | · | High pump operating temperature preventing condensation | | · | Corrosion resistant materials - stainless steel coolers and water circuits | | · | Efficient interstage coolers for LPCVD nitride process | | · | Complete pump safeguard system | | · | Control panel for monitoring operating conditions | | · | Canned motor | | · | Low service requirements |
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| Pumping speed (N2) at 50/60 Hz | 60 / 72 m3/h
(1,000 / 1,200 l/min) | | Ultimate pressure at 50/60 Hz | 5x10-2 / 4x10-2 mbar
(5.3 / 4.0 Pa) | | Water Consumption | 3.5 l/min | | Nitrogen Consumption | 10-12 slm
(17-20 Pa m3/s) | | Voltages ranges | 200-220 / 380-415 V | | Motor power, installed | 2.2 kW | | Weight, approx. | 220 kg | | Sizes (LxWxH) | 840 x 394 x 470 mm | | Inlet flange size | DN 40 KF | | Outlet flange size | DN 40 KF |
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| Product | Ordering No. | Typ | | A10S | 811-0010-2-000 | Dry Vacuum Pump A10S, 208 V, 50/60 Hz | | A10S | 811-0010-3-000 | Dry Vacuum Pump A10S, 400 V, 50/60 Hz | | A10S | 811-0010-2-E00 | Dry Vacuum Pump A10S, 208 V, 50/60 Hz, with two-stage Exhaust Pressure Switch | | A10S | 811-0010-3-E00 | Dry Vacuum Pump A10S, 400 V, 50/60 Hz, with two-stage Exhaust Pressure Switch |
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