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| · | Very low nitrogen consumption for purging | | · | Clean room compatible | | · | Low service requirements | | · | Compact size and small footprint |
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| Technical Characteristics |
| · | Multi-stage Roots design engineered for application in clean and medium harsh processes | | · | Complete pump safeguard system | | · | High pump operating temperature preventing condensation | | · | Low noise and low vibration | | · | Corrosion resistant materials-stainless steel coolers, water circuits | | · | Efficient interstage coolers for LPCVD nitride process | | · | Canned motor | | · | Low service requirements | | · | Control panel for monitoring operating conditions |
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| Pumping speed (N2) at 50/60 Hz | 150 / 180 m3/h
(2500 / 3000 l/min) | | Ultimate pressure at 50/60 Hz | 5.3x10-2 / 4x10-2 mbar
(5.3 / 4.0 Pa) | | Water Consumption | 3.5 l/min. | | Nitrogen Consumption | 10-12 slm
(17-20 Pa m3/sec) | | Voltages ranges | 200-220/380-415 V | | Motor power, installed | 3.7 kW | | Power at ultimate pressure | 2.6 kW | | Weight, approx. | 240 kg | | Sizes (LxWxH) | 900x394x470 mm | | Inlet flange size | DN 40 KF | | Outlet flange size | DN 40 KF |
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| Product | Ordering No. | Typ | | A25S | 811-0025-2-000 | Dry Vacuum Pump A25S, 208 V, 50/60 Hz | | A25S | 811-0025-3-000 | Dry Vacuum Pump A25S, 400 V, 50/60 Hz | | A25S | 811-0025-2-E00 | Dry Vacuum Pump A25S, 208 V, 50/60 Hz, 2-Stage Exhaust Pressure Switch | | A25S | 811-0025-3-E00 | Dry Vacuum Pump A25S, 400 V, 50/60 Hz, 2-Stage Exhaust Pressure Switch |
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