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| · | Very low nitrogen consumption for purging | | · | Clean room compatible | | · | Low service requirements | | · | Compact size and small footprint |
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| Technical Characteristics |
| · | Multi-stage Roots design engineered for application in clean and medium harsh processes | | · | Complete pump safeguard system | | · | High pump operating temperature preventing condensation | | · | Low noise and low vibration | | · | Corrosion resistant materials-stainless steel coolers, water circuits | | · | Efficient interstage coolers for LPCVD nitride process | | · | Canned motor | | · | Low service requirements | | · | Control panel for monitoring operating conditions |
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| Pumping speed (N2) at 50/60 Hz | 180 / 216 m3/h
(3000 / 3600 l/min) | | Ultimate pressure at 50/60 Hz | 4x10-3 / 3x10-3 mbar
(0.4 / 0.3 Pa) | | Water Consumption | 3.5 l/min | | Nitrogen Consumption | 10-13 slm
(17-22 Pa m3/sec) | | Voltages ranges | 200-220 V / 380-415 V | | Motor power, installed | 1.5 + 2.2 kW | | Weight, approx. | 330 kg | | Sizes (LxWxH) | 895x400x485 mm | | Inlet flange size | DN 50 KF | | Outlet flange size | DN 40 KF |
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| Product | Ordering No. | Typ | | A30W | 811-0030-2-000 | Dry Vacuum Pump A30W, 208 V, 50/60 Hz | | A30W | 811-0030-3-000 | Dry Vacuum Pump A30W, 400 V, 50/60 Hz | | A30W | 811-0030-2-E00 | Dry Vacuum Pump A30W, 208 V, 50/60 Hz, 2-stage exhaust pressure switch | | A30W | 811-0030-3-E00 | Dry Vacuum Pump A30W, 400 V, 50/60 Hz, 2-stage exhaust pressure switch |
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