EBARA ESA Dry Vacuum Pumps have been developed for clean processes and special applications. The ESA25-D has been developed from the successful A25S. This pump and the larger ESA70W-D and ESA200W are particularly suitable for H2 rich process gases because of their extremely good pumping speed for light gases. The models ESA200W, ESA300W and ESA500W are the right choice for the rapid evacuation of large volume chambers as the load lock and transfer chambers in FPD and LCD process systems. | 