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| · | Low Cost of Ownership | | · | Pump designed for rapid evacuation of huge gas loads | | · | High performance on load locks, transfer chambers with large volume and sputtering chambers | | · | Variable pumping speed to match application specific requirements | | · | Compact pump size |
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| Technical Characteristics |
| · | Roots pump design for application in clean and light duty processes | | · | High capacity main pump with RPM controllable booster pump integrated into one housing | | · | High pumping speed even in the high presure range close to atmosphere | | · | Brushless DC motor on booster pump for speed control | | · | Intelligent control system | | · | Complete pump safeguard system | | · | High pump operating temperature preventing condensation | | · | Low noise and low vibration | | · | Very small footprint | | · | Low consumption of power, nitrogen, cooling water | | · | Idle mode for energy saving |
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| Pumping speed (N2) | at 50 Hz
at 60 Hz | 1,680 m3/h (28,000 l/min)
1,800 m3/h (30,000 l/min) | | Ultimate pressure 50/60 Hz | 5.3 x 10E-3 mbar
(0.53 Pa) | | Cooling water requirements | 6 - 9 l/min | | Nitrogen consumption | 5 - 7 SLM
(8 - 11 Pa m3/sec) | | Voltages ranges | 200 V / 400 V / 440 V | | Power at ultimate pressure | 6.6 kW (50 Hz), 7.3 kW (60 Hz) | | Weight, approx. | 700 kg | | Sizes (LxWxH) | 1110 x 620 x 945 mm | | Inlet flange size | DN 100 ISO-K | | Outlet flange size | DN 40 KF |
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| Product | Ordering No. | Typ | | ESA300W | 816-0300-2-000 | Dry Vacuum Pump ESA300W, 208 V | | ESA300W | 816-0300-3-000 | Dry Vacuum Pump ESA300W, 400 V | | ESA300W | 816-0300-4-000 | Dry Vacuum Pump ESA300W, 440 V |
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