|
 |
| · | Low Cost of Ownership | | · | Pump designed for rapid evacuation of huge gas loads | | · | High performance on load locks, transfer chambers with large volume and sputtering chambers | | · | Variable pumping speed to match application specific requirements | | · | Compact pump size |
|
| Technical Characteristics |
| · | Roots pump design for application in clean and light duty processes | | · | High capacity main pump with RPM controllable booster pump integrated into one housing | | · | High pumping speed even in the high presure range close to atmosphere | | · | Brushless DC motor on booster pump for speed control | | · | Intelligent control system | | · | Complete pump safeguard system | | · | High pump operating temperature preventing condensation | | · | Low noise and low vibration | | · | Very small footprint | | · | Low consumption of power, nitrogen, cooling water | | · | Idle mode for energy saving |
|
|
 |
| Pumping speed (N2) | | 3,000 m3/h
(50,000 l/min) | | Ultimate pressure 50/60 Hz | 1.0 x 10E-2 mbar
(1.0 Pa) | | Cooling water requirements | 6 - 9 l/min | | Nitrogen consumption | 5 - 7 SLM
(8.5 - 11 Pa m3/sec) | | Voltages ranges | 200 V / 400 V / 440 V | | Power at ultimate pressure | 6.7 kW (50 Hz) | | Weight, approx. | 750 kg | | Sizes (LxWxH) | 1110 x 620 x 1010 mm | | Inlet flange size | DN 160 ISO-K | | Outlet flange size | DN 50 KF |
|
|
| |
| Product | Ordering No. | Typ | | ESA500W | 816-0500-2-000 | Dry Vacuum Pump ESA500W, 208 V | | ESA500W | 816-0500-3-000 | Dry Vacuum Pump ESA500W, 400 V | | ESA500W | 816-0500-4-000 | Dry Vacuum Pump ESA500W, 440 V |
|
|
|
|
|