|
 |
| · | Lowest cost of ownership in its class | | · | Very compact pump size | | · | Variable pumping speed to match application requirements | | · | Small number of models covering the full range of required pumping speeds | | · | State-of-the-art control and monitoring devices | | · | Idle mode can be employed for increased utility savings |
|
| Technical Characteristics |
| · | Multistage lobe design engineered for application in clean and medium harsh processes Load Lock, SEM, PVD, Ashing, Ion Implantation and Etch | | · | Main pump and booster pump with energy saving DC motors | | · | Intelligent control system | | · | Complete pump safeguard system | | · | High pump operating temperature preventing condensation | | · | Low noise and low vibration | | · | Thorougly corrosion resistant material | | · | Adjustable pumping speed by RPM variation | | · | Very small footprint | | · | Low consumption of electrical power, cooling water and nitrogen | | · | Idle mode for additional energy savings |
|
|
 |
| Pumping speed (N2), 50/60 Hz | 900 - 1,800 m3/h
(15,000 - 30,000 l/min) | | Ultimate pressure, 50/60 Hz | 2 x 10E-3 mbar
(0.2 Pa) | | Cooling water requirements | 3.5 - 8 l/min | Nitrogen Consumption
Clean applications | 2 - 12 slm (19 - 22 Pa m3/s)
2 slm (3.4 Pa m3/s) | | Voltages ranges | 200 - 220 / 380 - 440 V | | Power at ultimate pressure | 2.9 kW | | Maximum power | 7.5 kW | | Weight, approx. | 390 kg | | Dimensions (LxWxH) | 825 x 460 x 880 mm | | Inlet flange size | DN 100 ISO-K | | Outlet flange size | DN 40 KF |
|
|
| |
| Product | Ordering No. | Typ | | ESR300WN | 814-0300-2-0N0 | Vacuum Dry Pump ESR300WN, 208V, 50/60 Hz | | ESR300WN | 814-0300-3-0N0 | Vacuum Dry Pump ESR300WN, 400V, 50/60 Hz |
|
|
|
|
|