| The “Universal Monitoring System” UEM |  | is a software package to monitor in real time and in retrospect connected equipment such as vacuum pumps as well as downstream and upstream installed accessories. It shows its benefits especially where larger quantities of equipment have to performe flawlessly over long periodes of time. This, for example, applies for chip manufacturing plants where degradation in performance must be detected in a timely manner to conduct appropriate countermeasures.
The Universal Monitoring, UEM, represents a complex software package which is arranged in a modular design around a core module. Data acquisition and data evaluation follow SEMI Standards.
| · | Starting with the core module “UEM Online Data Acquisition” the completion of the full monitoring network can be arranged for by linking appropriate optional modules such as | | · | Historical Data Trending | | · | Cost of Ownership | | · | Maintenance | | · | Availability | | · | System Admin |
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