The EBARA VOS100 has the highest pumping speed to footprint ratio in the industry. The VOS100 is a multistage lobe pump designed for installation on or very close to the process tool for clean and light duty applications such as Load Lock and SEM. VOS series pumps are lighter, more compact and pumpdown faster than most point-of-use pumps on the market today.

The "P" version is suitable for the pumping of light corrosive gases (e.g. for oxide etching processes).