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| · | Small physical design, best match for tool integrated installation | | · | Unique pumping mechanism for fast pumpdowns | | · | Low Cost of Ownership | | · | No nitrogen purge required in clean applications | | · | Energy saving DC motor |
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| Technical Characteristics |
| · | Robust, proven Roots lobe style design | | · | High performance brushless DC motor | | · | Digital and analog signals available for interface to process tools | | · | Stackable installation possible | | · | CE marked, SEMI S2 as option, NRTL listed |
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| Pumping speed, 50/60 Hz | 108 m3/h
(1,800 l/min) | | Ultimate pressure, 50/60 Hz | 1.2 x 10E-2 mbar
(1.2 Pa)
| | Inlet flange size | DN 50 KF
| Outlet flange size
| DN 25 KF | | Power at ultimate pressure | 0.7 kW | | Maximum power | 2.2 kW | Cooling water requirements
| 1.5 - 3 l/min | | Bearing and dilution N2 | 0 SLM | | Cabinet dimensions, LxWxH | 450 x 230 x 275 mm
| | Weight, approx. | 60 kg |
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| Product | Ordering No. | Typ | | VOS100 | 819-0100-2-000 | Vacuum Dry Pump VOS100, 208 V |
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