| Epix Filter | The new requirements for "more chemically clean environment" have been driven by the demand for semiconductor industries, foodstuffs and pharmaceutical plants. EBARA's novel EPIX filters for removal of trace level chemical contaminants have been developed to reliably meet such requirement. The novel chemical filters are capable to remove acidic, basic and neutral salt contaminants in the air by means of chemical adsorption through ion exchange functions.
The EPIX filter exhibits its high performance at extremely low concentration ranges like ppb- and ppt-level of chemical contaminants in the air. |
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