EBARA´s Hybride Turbomolecular Pumps provide a clean, reliable vacuum for the highest requirements in the semiconductor industry. The pumps feature a five-axis magnetic bearing and tuning free half rack controller requiring no battery backup.

The ET series features a wide pressure range with maximum back pressure of 4 mbar.
The ETxxx-WS version is the corrosion resistant wide range type.

ETA turbomolecular pumps are designed for high throughput applications. Maximum outlet pressure is even 13 mbar.