EBARA Turbomolecular Pumps, ET Series, offer full magnetic levitation, while providing clean, reliable vacuum for today’s high technology environments. The ET Series features a five axis active magnetic bearing system and tuning free half rack controllers. Models range from 300 to 3300 l/s pumping speed, which have large allowable backpressures and corrosion resistance materials that provide superior durability to all reactive gases. Pump and controllers have interchangeability for the same models. Easy monitoring by liquid crystal displays (LCDs) show running conditions, operation hours, rotation speed and operating status (alarm trips).

Explanation of model (example):

ET	1600	WS	-	A
1	2	3		4

1  Series name
2  Nominal pumping speed (N2)
3  Structure of pump:
    W: wide range type
    WS: corrosion resistant wide range type
4  Added function:
    A: heated version

ET300W
ET600W
ET1301W
ET1600W
ET2500W
ET3300W