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| Technical Characteristics |
| · | Models range from 300 to 3300 l/s pumping speed | | · | Five axis active magnetic bearing system | | · | EBARA Turbo Pumps can be installed in any orientation | | · | Tuning free half rack controllers - pump and controllers have interchangeability for the same models | | · | Pump operating information displayed via LCD | | · | No back-up battery needed in case of power failure | | · | Controllers are equipped to operate the optional heaters | | · | CE marking, SEMI standards |
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| Pumping speed (N2), 50/60 Hz | 1,300 l/s | Ultimate pressure
| <10E-9 mbar
(<10E-7 Pa) | | Maximum outlet pressure | 4 mbar
(400 Pa) | | Cooling water consumption | > 2 l/min | Nitrogen consumption (for purging)
| 0.1 slm
(168 Pa l/s) | | Voltage | 220 V, single phase | | Weight, approx. | 40 kg | | Dimensions (L x diam.) | 280.5 x 285 mm | | Inlet flange size | DN 200 | | Outlet flange size | DN 40 KF | | Controller (tuning free) | 1306W-TF |
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| Product | Ordering No. | Typ | | ET1301W | 820-1301-2-W00-00-00 | Turbomolecular pump ET1301W, 220V | | ET1301WS | 820-1301-2-WS0-00-00 | Turbomolecular pump ET1301WS, 220V, corrosion resistant | | ET1301WS-A | 820-1301-2-WSA-00-00 | Turbomolecular pump ET1301WS-A, 220V, heated version |
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