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| · | Lowest power consumption:
Decreased user's Cost of Ownership and reduced company's carbon emissions | | · | Smaller weight and dimensions compared to earlier models:
User friendly | | · | No N2 purge in clean applications:
No nitrogen required | | · | Flexible rotation speed and idle mode as standard:
Further power saving |
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| Technical Characteristics |
| · | Multi-stage lobe design engineered for application in clean and medium harsh processes as Load Lock, SEM, PVD, Ashing, Ion Implantation and Etch | | · | Main pump and booster pump with energy saving DC motors | | · | Intelligent control system | | · | Complete pump safeguard system | | · | Low noise and low vibration | | · | Adjustable pumping speed by RPM variation | | · | Very small footprint | | · | Low consumption of electrical power, cooling water and nitrogen | | · | Idle mode for additional energy savings |
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| Pumping speed (N2) 50/60 Hz | 1,200 m3/h (20,000 l/min) | | Ultimate pressure 50/60 Hz | 5 x 10E-3 mbar (0.5 Pa) | | Cooling water requirements | 2 - 3 l/min | Nitrogen Consumption
Clean applications | 10 - 12 slm (17 - 20 Pa m3/s)
0 slm (0 Pa m3/sec) | | Voltages ranges | 200 - 220 / 380 - 440 V | | Maximum power | 5.1 kW | | Power at ultimate pressure | 750 W | | Weight, approx. | 170 kg | | Sizes (LxWxH) | 650 x 275 x 580 mm | | Inlet flange size | DN 100 ISO-K | | Outlet flange size | DN 40 KF |
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| Product | Ordering No. | Typ | | EV-S200 | 821-0200-2-000 | Dry Vacuum Pump EV-S200, 208V, 50/60 Hz | | 821-0200-3-000 | Dry Vacuum Pump EV-S200, 400V, 50/60 Hz | | EV-S200P | 821-0200-2-0P0 | Dry Vacuum Pump EV-S200P, 208V, 50/60 Hz | | 821-0200-3-0P0 | Dry Vacuum Pump EV-S200P, 400V, 50/60 Hz | | EV-S200N | 821-0200-2-0N0 | Dry Vacuum Pump EV-S200N, 208V, 50/60 Hz | | 821-0200-3-0N0 | Dry Vacuum Pump EV-S200N, 400V, 50/60 Hz |
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