Combustion System G5
Process Gas Combustion System G5
EBARA's Burner Washer G5 (principle: Gas Decomposition by Combustion) is a high efficient universal abatement system for abatement of the waste gases in the semiconductor, photovoltaics and thin films manufacturing. It is designed for the abatement of both CVD and etch gases.

Global environmental regulations concerning PFC gases are becoming more and more stringent. The G5 is a unique abatement system equipped with a patented "rolling" burner that guarantees reliable PFC abatement to an unprecedented low level.
The thermal decomposition in the flame is followed by a wet scrubbing of the burned products in a highly efficient 5-stage water scrubber to retain the remaining particles and adsorb the water soluble gases. The system is equipped with a large water tank for efficient absorption of large quantities of of water soluble gases and solid burn products.

The G5 nominal total waste gas capacity is 350 slm including nitrogen purge from vacuum pumps.

A variety of options are available, e.g.

Waste water pump for the positive drain (facility waste
   water line is above the system)
Heater jackets for inlet lines to prevent condensation
   and blockages
Gas inlet pressure sensors
Fuel leak sensors

Technical Characteristics:
· High efficient burner washer system (e.g. >99% DRE for PFCs) for low and high waste gas flows.
·Highest safety standards to eliminate any risk for operators and environment.
·Lowest Cost of Ownership through low utility consumption and by long maintenance intervals.
·No risk of corrosion - all pipes are protected with corrosion resistant material. No neutralisation agent is necessary.
·The system operates with city water - no water pre-conditioning is required.
·Automatic scrapers for mechanical cleaning of reactor and burner prevent blockages, allow cleaning without opening the system and reduce preventive maintenance.
·Two burning gases: LNG and propane.
·Best possible reduction of nitrogen oxides (NOx) by small amounts of purge gas necessary. That is especially true in combination with EBARA dry vacuum pumps with their small amounts of N2 purge required.
·Various operation modes allow to save utilities cost.
·Optimised design for more efficiency and service friendliness.
Technical Data
Maximum nominal flow rate350 slm (others on request)
Inlet portmax. 4 ports NW 40
Dimensions in mm1,200 (w) x 650 (d) x 1,900 (h)
Weight550 kg
Maximum power1.7 kVA
Fuel typeNatural gas or propane
Fuel*Natural gas: 14 [26] slm
Propane: 6 [11] slm
Oxygen*20 [58] slm
Dry air*140 [100] slm
Nitrogen13 slm (during operation)
City water10 l/min (drain water), 3 l/m in water save model
Cooling water3 l/min
* Values in brackets, [] show consumption when abating CF4.
 
Ordering Data
ProductOrdering No.Type
G5-A840-G5-2-A00Process Gas Combustion G5 for LNG
G5-P840-G5-2-P00Process Gas Combustion System G5 for propane
Please contact us for other models.