Used Products for Sale

EBARA frequently has available re-manufactured dry vacuum pumps and turbomolecular pumps as well as used wafer processing systems on sale at attractive conditions. Please check the list and contact us for a quotation.

Special offers for used Dry Vacuum Pumps:

EBARA Ref.	**Pump Model**	Voltage	*Status*	Quantity Available
102	A07V - Multi-stage Roots pump, 42 m2/h	208 V	new*	3
103	A10S - Multi-stage Roots pump, 60 m3/h	208V	reburbished	5
104	A10S - Multi-stage Roots pump, 60 m3/h	400 V	refurbished	6
106	---	---		-
107	A25S - Multi-stage Roots pump, 150 m3/h	208 V	refurbished	5
108	A30W - Multi-stage Roots pump with integrated booster pump, 180 m3/h	400 V	refurbished	6
109	A70W - Multi-stage Roots pump with integrated booster pump, 420 m3/h	208 V	new*	2
110	A70W - Multi-stage Roots pump, 420 m3/h	400 V	new*	5
111	A150W-M - Multi-stage Roots pump with integrated booster pump, 900 m3/h	208 V	refurbished	1
112	A150W-M - Multi-stage Roots pump with integrated booster pump, 900 m3/h	400 V	refurbished	5
113	AA10 - Multi-stage Roots pump, 78 m3/h	208 V	refurbished	2
114	AA30H - Multi-stage Roots pump, 180 m3/h	208 V	refurbished	2
115	AA100W - Multi-stage Roots pump with integrated booster pump, 600 m3/h	208 V	refurbished	3
116	AA200W - Multi-stage Roots pump with integrated booster pump, 1,080 m3/h	400 V	refurbished	1
117	AAS70WN - Screw pump with integrated booster pump, 420 m3/h	208 V	refurbished	1
118	---	---		-
119	AAS100WN - Screw pump with integrated booster pump, 600 m3/h	208 V	refurbished	1
120	AAS200WN - Screw pump with integrated booster pump, 1,200 m3/h	208 V	refurbished	5
All pumps are CE marked. Pumps are partly w/o housing. Subject to prior sale. * from excess stock.

Offers for used Wafer Processing Systems:


EBARA Ref.	*Tool Type*	*Application*	Quantity Available
201	EPO-222 CMP System	ILD	1
202	EPO-222 CMP System	Tungsten	1
203	FREX 200 CMP System	ILD	1
204	FREX 200 CMP System	Tungsten	1
205	FREX 300 CMP System	Copper	1

Equipment is offered subject to prior sale. Items will be quoted based upon specific configuration, terms and configuration required. Please contact info(at)ebara-pm.eu.