EBARA Turbomolecular Pumps

CLEAN AND RELIABLE HIGH VACUUM

EBARA´s hybrid turbomolecular pumps provide a clean, reliable high vacuum for the highest requirements in the semiconductor industry. The ET Series Turbomolecular Pumps are equipped with five-axis magnetic bearings and tuning free half-rack controllers requiring no battery backup. The pumps cover a wide pressure range with a maximum back pressure of 4 mbar.

HTP Series Turbomolecular Pumps are especially designed for high throughput applications. Maximum outlet pressure is even 8 mbar.

ET Series

EBARA Turbomolecular Pumps, ET Series, offer full magnetic levitation, while providing clean, reliable high vacuum for today’s high technology environments. The ET Series features a five axis active magnetic bearing system and tuning free half rack controllers. Models range from 300 to 3,300 l/s pumping speed, which have large allowable back pressures and corrosion resistance materials that provide superior durability to all reactive gases.

Pump and controllers have interchangeability for the same models. Easy monitoring by liquid crystal displays (LCDs) show running conditions, operation hours, rotation speed and operating status (alarm trips).

Model Name Description

 ET   
1600 
WS   
- A
1
 2
 3
4



1: Series name
2: Nominal pumping speed in l/s (N2)
3: Structure of pump:
         W: wide range type
         WS: corrosion resistant wide range type
4: Added function:
         A: heated version