EBARA - Innovation, Reliability, Sustainability

Global Innovators - Local Providers

Read More

Dry Vacuum Pumps

Forward-Looking Pump Solutions
for Clean Vacuum Applications.

Read More

Gas Abatement Systems

Point-of-use Treatment Systems -
highly productive for most processes
in the Semiconductor
and Photovoltaic Industry.

Read More

Wafer Processing Tools

Innovative Processing Technologies
for the Semiconductor Industry.

Read More

Vacuum Bake Cleaner

Cleaning Equipment for
GaN and AlN Coated Parts

Read More

New Model EV-L

EBARA's Model EV-L - a new generation of water-cooled dry vacuum pumps for semiconductor industry.

Semicon 2017

Booth B1 416 Please have a look the Advanced Packaging Conference.

SCEU17_Leaflet_APC

New Turbo Pumps

EBARA offers new families of compound turbomolecular pumps with mechanical bearing and with magnetically levitated rotors.
 

Exhibitions & Events

A regular dialogue with our customers and partners is very important to us improving continuosly our products and services! We invite you meeting us at the following Events.