EBARA provides high quality products and solutions for vacuum generation + waste gas treatment as well as state-of-the-art wafer processing tools.

Our primary markets are semiconductor, photovoltaics
and sophisticated vacuum applications.

Product of the month:
Dry vacuum pump ESA70W-D

The multi-stage Roots dry vacuum pump ESA70W-D is engineered for applications in clean and light duty processes. Its 3-lobe multi-stage Roots pump design is preventing back streaming, especially of light gases such as H2. The ESA70W-D is a combination of two vacuum pumps, a main pump with a booster pump integrated into one housing. 

Customer benefits are

■ Low media consumption compared to
    pumping speed: Good CoO

■ Compact vacuum pump size:
    Easy integration in process tools

■ Worldwide successful for pumping of
    H2 rich process gases:
    Best performance in H2 processes

■ Low noise level: User friendly

■ Dual voltage motor:
    Cost savings in stock inventory

■ Highly reliable due to EBARA’s
    experience: Long lifetime

More about ESA70W-D vacuum pumps