Efficient. Reliable. Eco-friendly.
From light to extremely harsh applications – our pump models will fulfil your requirements. Customized to the on-site specifications and conditions, we will find the best solution for you.
Dry Vacuum Pumps for Universal Applications
Find the right vacuum pump for your application.
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Ashing Atomic Layer Deposition (ALD) Chemical Vapor Deposition (CVD) Diffusion Epitaxy Etch Processes Ion Implant Lithography-Metrology Load Lock Vacuum Micro Machining (MEMS) Physical Vapor Deposition (PVD) Rapid Thermal Processing (RTP) Residual Gas Analysis Silicium Technology Sputtering Surface Analysis |
Coating Flat Panel Display (FDP) Industry Leak Detection Systems Machine Tooling Magnetic Media Medical Engineering Vacuum Drying |
Analytical Tools Electric Gravometrics Mass Spectrometres Microsopy Osmometrics XPS |
Biotechnology Elementary Particle Physics Nanotechnology Nuclear Fusion Particle Accelerator Plasma Research |
Atomic Layer Deposition (ALD) | LED Manufacturing |
Fluoroproducts Industrial Chemical Productions Oxidation of Pyrophoric Gases Special Chemistry |
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| Semiconductors | General Vacuum | Analytical Instruments | R & D | Photovoltaic | LED | Chemical Industry | |
| EV-A | |||||||
| EV-S | |||||||
| EV-L | |||||||
| EV-M | |||||||
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| EV-SA | |||||||
| ESR | |||||||
| EST | |||||||
| ESA | |||||||
You can filter the components according to the industries.
Dry Vacuum Pumps (9)
EV-A
Application Range
light
harsh
Pumping speed
250 – 1.000 l/min
Industries
EV-S
Application Range
light
harsh
Pumping speed
1.670 – 20.000 l/min
EV-L
Application Range
light
harsh
Pumping speed
10.000 – 18.000 l/min
Industries
EV-M
Application Range
light
harsh
Pumping speed
108 – 110.000 l/min
EV-PA
Application Range
light
harsh
Pumping speed
50 – 500 l/min
Industries
EV-SA
Application Range
light
harsh
Pumping speed
1.600 – 5.000 l/min
Industries
ESR
Application Range
light
harsh
Pumping speed
2.000 – 46.000 l/min
Industries
EST
Application Range
light
harsh
Pumping speed
1.000 – 50.000 l/min
ESA
Application Range
light
harsh
Pumping speed
3.000 – 50.000 l/min
