Dry Vacuum Pumps

Leading-edge technology for universal vacuum needs. For different requirements and industries.

Efficient. Reliable. Eco-friendly.

From light to extremely harsh applications – our pump models will fulfil your requirements. Customized to the on-site specifications and conditions, we will find the best solution for you.


Dry Vacuum Pumps for universal applications.

Find the right vacuum pump for your application.

Ashing
Atomic Layer Deposition (ALD)
Chemical Vapor Deposition (CVD)
Diffusion
Epitaxy
Etch processes
Ion implant
Lithography-Metrology
Load lock vacuum
Micro Machining (MEMS)
Physical Vapor Deposition (PVD)
Rapid thermal processing (RTP)
Residual gas analysis
Silicium technology
Sputtering
Surface analysis
Coating
Flat Panel Display (FDP)
Industry
Leak detection systems
Machine tooling
Magnetic media
Medical engineering
Vacuum drying
Analytical tools
Electric gravometrics
Mass spectrometres
Microsopy
Osmometrics
XPS
Biotechnology
Elementary particle physics
Nanotechnology
Nuclear fusion
Particle accelerator
Plasma research
Atomic layer deposition (ALD) LED Manufacturing Fluoroproducts
Industrial chemical productions
Oxidation of pyrophoric gases
Special chemistry
Semiconductors General Vacuum Analytical Instruments R & D Photovoltaic LED Chemical Industry
EV-A
EV-S
EV-L
EV-M
EV-PA
EV-SA
ESR
EST
ESA

You can filter the components according to the industries.

Dry Vacuum Pumps (9)

EV-A

Application Range

light harsh

Pumping speed

250 – 1.000 l/min

EV-S

Application Range

light harsh

Pumping speed

1.670 – 20.000 l/min

EV-L

Application Range

light harsh

Pumping speed

10.000 – 18.000 l/min

EV-M

Application Range

light harsh

Pumping speed

108 – 110.000 l/min

EV-PA

Application Range

light harsh

Pumping speed

50 – 500 l/min

EV-SA

Application Range

light harsh

Pumping speed

1.000 – 5.000 l/min

ESR

Application Range

light harsh

Pumping speed

2.000 – 46.000 l/min

EST

Application Range

light harsh

Pumping speed

1.000 – 50.000 l/min

ESA

Application Range

light harsh

Pumping speed

3.000 – 50.000 l/min

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