
Efficient. Reliable. Eco-friendly.
Innovative dry vacuum pumps for optimal performance. Customizable solutions for diverse industrial environments.
Dry Vacuum Pumps for Universal Applications
Find the right dry vacuum pump for your application.
Ashing Atomic Layer Deposition (ALD) Chemical Vapor Deposition (CVD) Diffusion Epitaxy Etch Processes Ion Implant Lithography-Metrology Load Lock Vacuum Micro Machining (MEMS) Physical Vapor Deposition (PVD) Rapid Thermal Processing (RTP) Residual Gas Analysis Silicium Technology Sputtering Surface Analysis |
Coating Flat Panel Display (FDP) Industry Leak Detection Systems Machine Tooling Magnetic Media Medical Engineering Vacuum Drying |
Analytical Tools Electric Gravometrics Mass Spectrometres Microsopy Osmometrics XPS |
Biotechnology Elementary Particle Physics Nanotechnology Nuclear Fusion Particle Accelerator Plasma Research |
Atomic Layer Deposition (ALD) | LED Manufacturing |
Fluoroproducts Industrial Chemical Productions Oxidation of Pyrophoric Gases Special Chemistry |
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Semiconductors | General Vacuum | Analytical Instruments | R & D | Photovoltaic | LED | Chemical Industry | |
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ESA |
You can filter the components according to the industries.
Dry Vacuum Pumps (9)
EV-A

Application Range
light
harsh
Pumping speed
250 – 1.000 l/min
Industries
EV-S

Application Range
light
harsh
Pumping speed
1.670 – 20.000 l/min
EV-L

Application Range
light
harsh
Pumping speed
10.000 – 18.000 l/min
Industries
EV-M

Application Range
light
harsh
Pumping speed
108 – 110.000 l/min
EV-PA

Application Range
light
harsh
Pumping speed
50 – 500 l/min
Industries
EV-SA

Application Range
light
harsh
Pumping speed
1.600 – 5.000 l/min
Industries
ESR

Application Range
light
harsh
Pumping speed
2.000 – 46.000 l/min
Industries
EST

Application Range
light
harsh
Pumping speed
1.000 – 50.000 l/min
ESA

Application Range
light
harsh
Pumping speed
3.000 – 50.000 l/min