The energy saver

The EV-S has the lowest power consumption in its class. The flexible
rotation speed and idle mode enable the reduced energy consumption.
No N2 purge or nitrogen is needed in clean applications.


The EV-S has the lowest power consumption in its class. The flexible rotation speed and idle mode make their contribution to save energy. In clean applications no N2 purge or nitrogen is required.

Core Benefits

Significantly reduced energy consumption

Very small footprint

High profitability

Product Information

Application Range

light harsh

Pumping speed

1.670 – 20.000 l/min






*All Models are available in "N" (Nickel alloy) and "P" (Nitrogen purge module) version

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Applications for EV-S

  • Chemical Vapor Deposition (CVD)
  • Load Lock Vacuum
  • Transfer
  • Etching

Elevate Your Operation with the Efficient EV-S Dry Vacuum Pump

Prepare to enhance your business operations with the remarkable EV-S dry vacuum pump, a front-runner in the modern lineup of high-performing dry vacuum pumps from EBARA. Designed with unmatched efficiency and a range of customizable features, the EV-S stands tall as the epitome of innovation and performance.

Unmatched Energy Efficiency: The Lowest Power Consumption in Its Class

Step into a realm of unprecedented efficiency with the EV-S dry vacuum pump. Crafted meticulously to offer the lowest power consumption in its class, this stellar product promises significantly reduced energy expenditure, driving down operation costs and paving the path for high profitability. Its distinctive attribute of flexible rotation speed and idle mode furthers its commitment to energy conservation, making it a standout choice for forward-thinking enterprises.

A New Wave of Flexibility: Customizable to Your Needs

Meet the pump that adapts to your unique requirements with a breath of customization options. Available in both “N” and “P” versions, the EV-S offers flexibility like no other. Opt for the “N” variant for a structure fortified with nickel alloy, or choose the “P” version which includes a nitrogen purge module. This level of customization ensures that the EV-S integrates seamlessly into various operational frameworks, providing a tailored solution for every business.

An Environmentally Conscious Choice: No N2 Purge Required in Clean Applications

The EV-S champions environmental consciousness by eliminating the need for N2 purge or nitrogen in clean applications, fostering a greener and more sustainable operational environment. It’s not just a pump; it’s a testament to EBARA’s commitment to crafting solutions that are in harmony with the planet, promoting cleaner and safer working environments globally.

Maximize Your Space: The Very Small Footprint of EV-S

Discover how the EV-S leverages a very small footprint to grant you the luxury of space, ensuring that it integrates seamlessly without occupying extensive floor area. This compact design opens up a world of possibilities, allowing for more flexible and optimized facility layouts, and granting your business the agility it deserves.

Embark on a Journey Towards Elevated Profitability

Seize the opportunity to elevate your business’s profitability with a pump that promises low operation costs paired with high-efficiency operation. The EV-S is not just a pump; it is a strategic asset, a catalyst for driving business growth through efficiency and performance that surpasses industry standards.

Your Pathway to High Profitability with EBARA’s EV-S

As we delve into the intricate fabric of the EV-S, it becomes evident that this product is not just a vacuum pump but a partner in your journey towards success. Crafted with an unwavering focus on efficiency, adaptability, and environmental consciousness, the EV-S embodies a revolutionary approach to dry vacuum technology.

Make a calculated choice for success by opting for the EV-S dry vacuum pump. Discover more in the comprehensive collection of dry vacuum pumps at EBARA and pave the path for a future of unbounded potential and profitability in your business operations. Let the EV-S be the cornerstone of your business’s journey to unprecedented heights.

Success Story

Smart, clean and green.

The chemical industry profits from our integrated solution for the disposal of fluorine-containing gases through highly efficient and reliable gas abatement systems and vacuum pumps.

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Best reliability in class. Best return on investment in class. 100% Peace of Mind