EV-S

The energy saver

The EV-S has the lowest power consumption in its class. The flexible
rotation speed and idle mode enable the reduced energy consumption.
No N2 purge or nitrogen is needed in clean applications.

Description

The EV-S has the lowest power consumption in its class. The flexible rotation speed and idle mode make their contribution to save energy. In clean applications no N2 purge or nitrogen is required.


Core Benefits

Significantly reduced energy consumption

Very small footprint

High profitability

Product Information

Application Range

light harsh

Pumping speed

1.670 – 20.000 l/min

Models

EV-S20*

EV-S30*

EV-S50*

EV-S100*

EV-S200*

*All Models as N (Nickel resitant alloy) and P (pressure sensor) version

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Applications_List_Background_Bright

Applications for EV-S

  • Chemical Vapor Deposition (CVD)
  • Load lock vacuum
  • Transfer
  • Etching

Success Story

Smart, clean and green

The chemical industry profits from our integrated solution for the disposal of fluorine-containing gases through highly efficient and reliable gas abatement systems and vacuum pumps.

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You are interested in integrated solutions?

100% Peace of Mind
Best reliability in class. Best return on investment in class. 100% Peace of Mind