With our portfolio of dry vacuum pumps and gas abatement systems we offer a customized solution for the production of solar cells with high precision wafers.
Learn more about our Components.
Applications for Photovoltaic purpose
EBARA components are designed for the process operating point. Due to an excellent pump temperature management, there is no condensation. High torque motors provide the needed power. The robustness of the pumps ensures a long operation time.
- Atomic layer deposition (ALD)