Our commitment

Process stability. Reliability. Long runtime.

Industries

EPME offers the best-in-class solutions for industries with the highest requirements. Focus on your core business – we will take care of the processes for vacuum, gas abatement and CMP.

Industries and Applications

EBARA products support various applications in different industries.

Semiconductors

  • Ashing
  • Atomic Layer Deposition (ALD)
  • Chemical Vapor Deposition (CVD)
  • Diffusion
  • Epitaxy
  • Etch processes
  • Ion implant
  • Lithography-Metrology
  • Load lock vacuum
  • Micro Machining (MEMS)
  • Physical Vapor Deposition (PVD)
  • Rapid thermal processing (RTP)
  • Residual gas analysis
  • Silicium technology
  • Sputtering
  • Surface analysis

General Vacuum

  • Coating
  • Flat Panel Display (FDP)
  • Industry
  • Leak detection systems
  • Machine tooling
  • Magnetic media
  • Medical engineering
  • Vacuum drying

Analytical Instruments

  • Analytical tools
  • Electric gravometrics
  • Mass spectrometres
  • Microsopy
  • Osmometrics
  • XPS

R & D

  • Biotechnology
  • Elementary particle physics
  • Nanotechnology
  • Nuclear fusion
  • Particle accelerator
  • Plasma research

Photovoltaic

  • Atomic layer deposition (ALD)

LED

  • LED Manufacturing

Chemical Industry

  • Fluoroproducts
  • Industrial chemical productions
  • Oxidation of pyrophoric gases
  • Special chemistry

Find out more about our Components and Systems best suited to your requirements.

Components Systems

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