Our Commitment

Process stability. Reliability. Long runtime.

Industries

EPME offers the best-in-class solutions for industries with the highest requirements. Focus on your core business – we will take care of the processes for vacuum, gas abatement and CMP.

Industries and Applications

EBARA products support various applications in different industries.

Semiconductors

  • Ashing
  • Atomic Layer Deposition (ALD)
  • Chemical Vapor Deposition (CVD)
  • Diffusion
  • Epitaxy
  • Etch Processes
  • Ion Implant
  • Lithography-Metrology
  • Load Lock Vacuum
  • Micro Machining (MEMS)
  • Physical Vapor Deposition (PVD)
  • Rapid Thermal Processing (RTP)
  • Residual Gas Analysis
  • Silicium Technology
  • Sputtering
  • Surface Analysis

General Vacuum

  • Coating
  • Flat Panel Display (FDP)
  • Industry
  • Leak Detection Systems
  • Machine Tooling
  • Magnetic Media
  • Medical Engineering
  • Vacuum Drying

Analytical Instruments

  • Analytical Tools
  • Electric Gravometrics
  • Mass Spectrometres
  • Microsopy
  • Osmometrics
  • XPS

R & D

  • Biotechnology
  • Elementary Particle Physics
  • Nanotechnology
  • Nuclear Fusion
  • Particle Accelerator
  • Plasma Research

Photovoltaic

  • Atomic Layer Deposition (ALD)

LED

  • LED Manufacturing

Chemical Industry

  • Fluoroproducts
  • Industrial Chemical Productions
  • Oxidation of Pyrophoric Gases
  • Special Chemistry

Find out more about our Components and Systems best suited to your requirements.

Components Systems

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