Our Service for CMP Systems

From our helpdesk and on-site field service assignments to spare parts delivery and process support. We are here for you.

Optimize your processes.

Customer Support Systems

The helpline to find solutions

Our Service Team cares for all our tool platforms and options. If you have no on-site service, contact our team about technical requests and needs.

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Field Service Systems

At your side by request

Our CMP Systems experts for 200 mm & 300 mm, robotics, software, mechanics and endpoint, provide you with on-site support. All services are documented in a service report for follow-up actions.

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Repair Service

Our service team in the refurbishment centre takes care of OEM items, repairs and refurbishes mechanical assemblies and electrical components.

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Repair Service for

  • G3/GX Head Cylinder Assy Refurbishment
  • G2/G3/GX Head Rebuilts
  • Top Ring Shaft Refurbishment
  • Mity Controllers
  • Endpoint System Parts Repair
  • Robots and Robots Controllers
  • Scodip CLC
  • Top Ring & Dresser Spindle Assy Refurbishment
  • Turn Table Motors
  • Controllers and Motors by Yaskawa & Mitsubishi
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All tools are refurbished to a high quality following standard OEM procedures. We offer tool upgrades to meet your specifications. All set-up tests are done in a cleanroom at our service centre.

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Refurbishment center Dresden overhaul

Spare Parts

Our warehouse stocks the original EBARA spare parts. The components are available within 24 hours. Spare parts from other manufacturers are available on request.

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Are you interested in CMP Systems?