Description
The EMT is a 5-axis magnetically levitated, hydrocarbon-free vacuum pump. Five major EMT types are available providing temperature control, corrosion resistance, ultra-low vibration and much more.
Core Benefits
Product Information
Application Range
light
harsh
Pumping speed
340 – 2.400 l/sec
Models
EMT397M
EMT427M
EMT907M
EMT1307M
EMT2400M
Industries
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Applications for EMT
- EUV Lithography
- Micro-machining (MEMS)
- CD Line Width Measurement
- SEM/TEM Electron
- Microscopy
- Nano-technology
- XPS (X-ray Photoelectron Spectroscopy)
Success Story
Smart, clean and green.
The chemical industry profits from our integrated solution for the disposal of fluorine-containing gases through highly efficient and reliable gas abatement systems and vacuum pumps.
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