The power pack

For ultra-high vacuum requirements and the harshest applications.


The EMT is a 5-axis magnetically levitated, hydrocarbon-free vacuum pump. Five major EMT types are available providing temperature control, corrosion resistance, ultra-low vibration and much more.

Core Benefits

Ultra-high vacuum

Most energy efficient temperature

Radiation resistent or with PK board inside

Completely hydrocarbon-free

Flexible installation

All safety standards

Product Information

Molekularvakuumpumpe, Vakuum, Turbomolekular

Application Range

light harsh

Pumping speed

340 – 2.400 l/sec







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Applications for EMT

  • EUV Lithography
  • Micro-machining (MEMS)
  • CD Line Width Measurement
  • SEM/TEM Electron
  • Microscopy
  • Nano-technology
  • XPS (X-ray Photoelectron Spectroscopy)

EMT Turbo Molecular Pump: Synonymous with Innovation and Efficiency

Dive into the world of advanced technology with the EMT Turbo Molecular Pump, designed to meet the exacting standards of high-tech manufacturing environments. A part of the elite range of Turbo Molecular Pumps, the EMT promises a series of features and benefits that set it apart in the competitive market.

Key Features that empower the EMT to stand tall in the industry:

  • 5-Axis Magnetically Levitated Design: The core of its functionality is the 5-axis magnetically levitated structure, ensuring a hydrocarbon-free operation and delivering an impressive performance that is both eco-friendly and efficient.
  • Temperature Control: One of the remarkable highlights of the EMT series is the superior temperature control feature. This enables the most energy-efficient management of temperature, promising optimum performance across various conditions.
  • Corrosion Resistance: The pump exhibits an impressive resistance to corrosion, a feature that promises longevity and robust performance, even in challenging environments.
  • Ultra-Low Vibration: Experience an operation that is smooth and almost silent, thanks to the ultra-low vibration technology incorporated in the EMT pump, a feature that guarantees stability and efficiency.

Benefits that Make a Difference

Choosing the EMT pump opens up a world of benefits that redefine efficiency and safety in manufacturing setups:

  • Ultra-High Vacuum: The pump promises ultra-high vacuum conditions, facilitating processes in highly controlled environments, thus elevating the quality and precision of manufacturing outputs.
  • Radiation Resistance: Be it with the integration of a PK board or the inherent radiation-resistant property, the EMT pump promises safety and durability, proving to be a reliable ally in high-tech manufacturing scenarios.
  • Hydrocarbon-Free Operation: As a completely hydrocarbon-free solution, it showcases a commitment to clean and sustainable technology, enhancing the lifecycle and reducing maintenance demands.
  • Installation Flexibility: The EMT pump grants the freedom of installation in any orientation, ensuring easy integration into various setups, thereby saving valuable time and resources.
  • Adherence to Safety Standards: Upholding stringent safety standards, it promises a hassle-free and reliable operational cycle, standing guard against unforeseen complications.

Discover the Innovations with EMT

Brought to life with meticulous attention to detail and backed by a commitment to quality, the EMT Turbo Molecular Pump showcases the pinnacle of innovation in vacuum pump technology, standing as a testimony to EBARA’s prowess in bringing forth solutions that are tuned to perfection for a wide range of industrial applications. Invite innovation into your manufacturing setups with the EMT Turbo Molecular Pump, where technology meets efficiency to facilitate a future of seamless operations.

Success Story

Smart, clean and green.

The chemical industry profits from our integrated solution for the disposal of fluorine-containing gases through highly efficient and reliable gas abatement systems and vacuum pumps.

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