EMT

The power pack

For ultra-high vacuum requirements and the harshest applications

Description

The EMT is a 5-axis magnetically levitated, hydrocarbon-free vacuum pump. Five major EMT types are available providing temperature control, corrosion resistance, ultra-low vibration and much more.


Core Benefits

Ultra-high vacuum

Most energy efficient temperature

Radiation resistent

Completely hydrocarbon-free

Flexible installation

All safety standards


Product Information

Application Range

light harsh

Pumping speed

340 – 2.400 l/sec

Models

EMT397M

EMT427M

EMT907M

EMT1307M

EMT2400M

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Applications for EMT

  • EUV lithography
  • Micro-machining (MEMS)
  • CD line width measurement
  • SEM/TEM Electron
  • Microscopy
  • Nano-technology
  • XPS (X-ray photoelectron spectroscopy)

Success Story

Smart, clean and green

The chemical industry profits from our integrated solution for the disposal of fluorine-containing gases through highly efficient and reliable gas abatement systems and vacuum pumps.

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