Responsible. Sustainable. Clean.
Support for our planet is a key message of EBARA. Keeping the environment clean and taking care of sustainable gas abatement is our job. Our burner washers ensure high safety standards and clean within the closed system.
Gas Abatement Solutions for Universal Abatement Applications
Find the right gas abatement solution for your application.
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Ashing Atomic Layer Deposition (ALD) Chemical Vapor Deposition (CVD) Diffusion Epitaxy Etch Processes Ion Implant Lithography-Metrology Load Lock Vacuum Micro Machining (MEMS) Physical Vapor Deposition (PVD) Rapid Thermal Processing (RTP) Residual Gas Analysis Silicium Technology Sputtering Surface Analysis |
Coating Flat Panel Display (FDP) Industry Leak Detection Systems Machine Tooling Magnetic Media Medical Engineering Vacuum Drying |
Analytical Tools Electric Gravometrics Mass Spectrometres Microsopy Osmometrics XPS |
Biotechnology Elementary Particle Physics Nanotechnology Nuclear Fusion Particle Accelerator Plasma Research |
Atomic Layer Deposition (ALD) | LED Manufacturing |
Fluoroproducts Industrial Chemical Productions Oxidation of Pyrophoric Gases Special Chemistry |
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| Semiconductors | General Vacuum | Analytical Instruments | R & D | Photovoltaic | LED | Chemical Industry | |
| G5 | |||||||
| G6 | |||||||
| TND | |||||||
| Dynox | |||||||
You can filter the components according to the industries.
Gas Abatement Solutions (4)
G5
Industries
G6
TND
Dynox
