Leading Technology

The Champions – CMP Tools for Perfection in Planarization Processes.

To Be On Top.

As a world market leader in CMP systems, we provide the semiconductor industry with state-of-the art design and performance to meet the most advanced fabrication demands such as perfect planarization technology for 150 mm, 200 mm and 300 mm wafer production.

Fast Growing Installation Base – the F-REX200M2

The F-REX200M2 polishes 200 mm wafers with high k-materials and aluminium layers. Equipped with
user-oriented system configuration, the modular design is suitable for multiple process setups.

Also available for 150 mm wafers is the F-REX150M2.

The Best-in-Class CMP Tool – the F-REX300X

CMP tool Systeme Semiconductor Halbleiter wafer efficiency process

The F-REX300X polishes 300 mm wafers.  With four platens and a layout for different parallel and serial polishing modes
to target Cu and other advanced applications.

EBARA’s products in the semiconductor production

Please note: When you click “play” on a Youtube video, your cookies data will be transmitted to another country, in this case to Google, which is based in the US. The US has been deemed by the European Court of Justice as a country with an insufficient level of data protection according to EU standards (the EU-US Privacy Shield has been declared invalid). In particular, there is a risk that your data will be processed by US authorities, for control and for monitoring purposes, possibly also without any legal remedy.

Load video

Core Benefits

High process performance

High volume manufacturing

Energy saving design concept

Customer specific options

High reliability

Experience in CMP since 1992

Applications_List_Background_Bright

Applications for F-REX

  • Oxide
  • ILD (Interlevel Dielectric)
  • STI (Shallow Trench Isolation)
  • Tungsten
  • Copper for IC Fabrication
  • MEMS
  • SOI (Silicon On Insulator)
  • Magnetic Media

Do you need Service support?

100% Peace of Mind
Best reliability in class. Best return on investment in class. 100% Peace of Mind