ESR

The universal manager

Water-cooled dry vacuum pump ESR with superior corrosion resistance.

Description

The ESR is perfect for medium to harsh applications with low ultimate pressure. The variable pumping speeds ensure a highly flexible usage. Low noise level and low vibration are key features of the ESR series.


Core Benefits

High corrosion resistance

High flexbility

Nickel resistent

Low cost of ownership

Low noise level

Low vibration


Product Information

Application Range

light harsh

Pumping speed

2.000 – 46.000 l/min

Models

ESR20N

ESR30

ESR80WN

ESR100WN

ESR200WN

ESR300WN

ESR500WN

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Applications_List_Background_Bright

Applications for ESR

  • Physical Vapor Deposition (PVD)
  • Ashing
  • Sputtering
  • Ion implant
  • Etching
  • SEM
  • WF CVD

Success Story

Smart, clean and green

The chemical industry profits from our integrated solution for the disposal of fluorine-containing gases through highly efficient and reliable gas abatement systems and vacuum pumps.

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