The ESR is perfect for medium to harsh applications with low ultimate pressure. The variable pumping speeds ensure a highly flexible usage. Low noise level and low vibration are key features of the ESR series.
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Applications for ESR
- Physical Vapor Deposition (PVD)
- Ion implant
- WF CVD
Smart, clean and green
The chemical industry profits from our integrated solution for the disposal of fluorine-containing gases through highly efficient and reliable gas abatement systems and vacuum pumps.Read More