Description
The ESR is perfect for medium to harsh applications with low ultimate pressure. The variable pumping speeds ensure a highly flexible usage. Low noise level and low vibration are key features of the ESR series.
Core Benefits
Product Information
Application Range
light
harsh
Pumping speed
2.000 – 46.000 l/min
Models
ESR20N
ESR30
ESR80WN
ESR100WN
ESR200WN
ESR300WN
ESR500WN
Industries
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Applications for ESR
- Physical Vapor Deposition (PVD)
- Ashing
- Sputtering
- Ion Implant
- Etching
- SEM
- WF CVD
Success Story
Smart, clean and green.
The chemical industry profits from our integrated solution for the disposal of fluorine-containing gases through highly efficient and reliable gas abatement systems and vacuum pumps.
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