100%
Solutions

Peace of mind with cost-cutting benefits. With our dry vacuum pumps and gas abatement systems you drive the future.

Peace of Mind
Cost-Cutting Benefits

Tailored to your requirements, we offer a wide range of dry vacuum and turbo molecular pumps. Combined with gas abatement systems, we have an integrated solution with significant cost benefits for you.

Components and Applications

Our wide range of pump models and gas abatement systems.

	Ashing Atomic Layer Deposition (ALD) Chemical Vapor Deposition (CVD) Diffusion Epitaxy Etch Processes Ion Implant Lithography-Metrology Load Lock Vacuum Micro Machining (MEMS) Physical Vapor Deposition (PVD) Rapid Thermal Processing (RTP) Residual Gas Analysis Silicium Technology Sputtering Surface Analysis	Coating Flat Panel Display (FDP) Industry Leak Detection Systems Machine Tooling Magnetic Media Medical Engineering Vacuum Drying	Analytical Tools Electric Gravometrics Mass Spectrometres Microsopy Osmometrics XPS	Biotechnology Elementary Particle Physics Nanotechnology Nuclear Fusion Particle Accelerator Plasma Research	Atomic Layer Deposition (ALD)	LED Manufacturing	Fluoroproducts Industrial Chemical Productions Oxidation of Pyrophoric Gases Special Chemistry
	Semiconductors	General Vacuum	Analytical Instruments	R & D	Photovoltaic	LED	Chemical Industry

EV-A
EV-S
EV-L
EV-M
EV-PA
EV-SA
ESR
EST
ESA
G5
G6
TND
Dynox
EMT
EMT-MK
EBT

Components

The EBARA components portfolio includes dry and turbo molecular vacuum pumps as well as gas abatement systems. Customers value the quality, stability and low cost of ownership.

Dry vacuum pumps

Solutions for various vacuum applications needed in different industries. With over 100 years of experience in pump technology.

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Turbo molecular pumps

Pumps with mechanical bearing and magnetically levitated rotors. Suitable for varied applications such as ultra-high vacuum.

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Gas abatement solutions

The G and the TND series are highly efficient universal abatement solutions. We care about
a clean environment.

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Integrated Solutions

Benefits may include reduced costs for parts, efficient pump installation and simplified maintenance.

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Engineering

Our Applications Team develops adaptions and creates the best suited solution for vacuum pumps and abatement systems.

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Success Story

Efficient, smart and green.

Vaccum solutions for coating systems to produce ultra-thin modules for solar energy.

EBARA Worldwide Brand Movie

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Since 1912 EBARA is dedicated to drive the future of vacuum and semiconductor systems.

About Us