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Solutions

Peace of mind with cost-cutting benefits. With our dry vacuum pumps and gas abatement systems you drive the future.

Peace of mind.
Cost-cutting benefits.

Tailored to your requirements, we offer a wide range of dry vacuum and turbo molecular pumps. Combined with gas abatement systems, we have an integrated solution with significant cost benefits for you.


Components and Applications

Our wide range of pump models and gas abatement systems.

Ashing
Atomic Layer Deposition (ALD)
Chemical Vapor Deposition (CVD)
Diffusion
Epitaxy
Etch processes
Ion implant
Lithography-Metrology
Load lock vacuum
Micro Machining (MEMS)
Physical Vapor Deposition (PVD)
Rapid thermal processing (RTP)
Residual gas analysis
Silicium technology
Sputtering
Surface analysis
Coating
Flat Panel Display (FDP)
Industry
Leak detection systems
Machine tooling
Magnetic media
Medical engineering
Vacuum drying
Analytical tools
Electric gravometrics
Mass spectrometres
Microsopy
Osmometrics
XPS
Biotechnology
Elementary particle physics
Nanotechnology
Nuclear fusion
Particle accelerator
Plasma research
Atomic layer deposition (ALD) LED Manufacturing Fluoroproducts
Industrial chemical productions
Oxidation of pyrophoric gases
Special chemistry
Semiconductors General Vacuum Analytical Instruments R & D Photovoltaic LED Chemical Industry
EV-A
EV-S
EV-L
EV-M
EV-PA
EV-SA
ESR
EST
ESA
G5
G6
EMT
EMT-MK
EBT

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