
Peace of Mind
Cost-Cutting Benefits
Tailored to your requirements, we offer a wide range of dry vacuum and turbo molecular pumps. Combined with gas abatement systems, we have an integrated solution with significant cost benefits for you.
Components and Applications
Our wide range of pump models and gas abatement systems.
Ashing Atomic Layer Deposition (ALD) Chemical Vapor Deposition (CVD) Diffusion Epitaxy Etch Processes Ion Implant Lithography-Metrology Load Lock Vacuum Micro Machining (MEMS) Physical Vapor Deposition (PVD) Rapid Thermal Processing (RTP) Residual Gas Analysis Silicium Technology Sputtering Surface Analysis |
Coating Flat Panel Display (FDP) Industry Leak Detection Systems Machine Tooling Magnetic Media Medical Engineering Vacuum Drying |
Analytical Tools Electric Gravometrics Mass Spectrometres Microsopy Osmometrics XPS |
Biotechnology Elementary Particle Physics Nanotechnology Nuclear Fusion Particle Accelerator Plasma Research |
Atomic Layer Deposition (ALD) | LED Manufacturing |
Fluoroproducts Industrial Chemical Productions Oxidation of Pyrophoric Gases Special Chemistry |
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Semiconductors | General Vacuum | Analytical Instruments | R & D | Photovoltaic | LED | Chemical Industry | |
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Success Story
Efficient, smart and green.
Vaccum solutions for coating systems to produce ultra-thin modules for solar energy.
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EBARA Worldwide Brand Movie
Since 1912 EBARA is dedicated to drive the future of vacuum and semiconductor systems.