Since 1912

Leading-edge technology from Japan.

Technology. Passion.
Support the Globe.

EBARA is a worldwide leading global manufacturer of vacuum and semiconductor systems used in the production of wafers, liquid crystals, solar cells and other products requiring advanced technology. EBARA has the second largest global market share for CMP systems. With a development department in Fujisawa and manufacturing in Kumamoto, EBARA can rapidly respond to customers’ needs and achieve mass production. EBARA Corporation was founded in November 1912 and is headquartered in Tokyo, Japan.

16,550+

Employees Worldwide

509+

Billion JPY Net Sale

96

Group Companies Worldwide

„When you work with passion and dedication anything is possible.“

Issey Hatakeyama, founder of EBARA
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Challenge and creativity

The driving force

Our brand statement reflects our entrepreneurial spirit, which is never satisfied with the status quo. Ahead stands for our leadership – always one step ahead of the competition. Beyond expresses our promise to exceed expectations of our stakeholders. That is our motivation day-by-day.

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EBARA worldwide Brand Movie

Since 1912 EBARA is dedicated to drive the future of vacuum and semiconductor systems.

We support our globe.

Corporate Social Responsibility

The EBARA Group is also committed to social contribution activities with the focus being on technical and educational assistance in business fields related to water, air and the environment.

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Tradition meets innovation.

EBARA can look back on a company history rich in tradition. The roots lie in Japan. To this day, EBARA is characterized by top Japanese technology. EBARA’s research and development team is constantly driving innovations forward.


1912



EBARA founded by Issey Hatakeyama


1915

Production of record-breaking large-size pumps for Tokyo City with a diameter of 1,140 mm


1920

Registration of EBARA Corporation


1921

First centrifugal blower by EBARA


1924

First axial-flow pump in Japan


1925 – 1931

Production of pumps in Japan for city water, first centrifugal chiller in Japan, first rapid filter for city waterworks in Japan


1955

Standardization and mass production of small-size pumps


1961

First mechanical stoker type incinerator


1965

Established Fujisawa Plant. In 2008 over 15 million standard pumps were produced here


1975

First oversea production plant in Brazil


1985

Entry in the business for semiconductor industry


1986

First dry vacuum pump


1990

First plating system


1992

First CMP system


1998 – 2019

Continuous evolution of gas abatement systems
(GDC => GDC-S => G5 => G6 => TND)


2004

First bevel polishing system


2005 – 2019

Continuous evolution of vacuum pumps (EV-PA) and CMP systems (F-Rex200M2 & F-REX300X)


2019

More than 190,000 sold dry vacuum pumps


We support our planet.