The analytical one

Air-cooled EV-SA dry vacuum pump for clean vacuum applications.


The EV-SA has an excellent performance for light duty applications. The energy consumption is significantly reduced. The operation cost is very low and the footprint small. A powerful solution with high ROI rate. Small but strong.

Core Benefits

Lowest energy consumption

No maintenance

Low operation costs

Wide vacuum range

High profitability

Minimal footprint

Product Information

dry vacuum pump

Application Range

light harsh

Pumping speed

1.600 – 5.000 l/min




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Applications for EV-SA

  • Lithography-Metrology
  • Physical Vapor Deposition (PVD)
  • Load Lock Vacuum
  • Mass Spectrometres
  • Transfer
  • SEM

Unveiling the Mighty Mini: The EV-SA Dry Vacuum Pump

Dive into the distinctive attributes of the EV-SA dry vacuum pump, an unparalleled offering from EBARA Precision Machinery Europe (EPME), the titan in vacuum and semiconductor systems. Here, we unfold the nuances of the highly efficient EV-SA dry vacuum pump that stands tall with its small stature yet high-powered performance. Journey with us as we delineate the essential features and remarkable benefits of the EV-SA dry vacuum pump, steering clear of the overly commercial territory, bringing to you an unbiased glimpse into what makes this product a powerful ally in light duty applications.

Small, Yet Unyielding: Defining the EV-SA’s Core

The EV-SA heralds a new era with its exemplary performance in light duty applications, where it promises a power-packed performance while retaining a compact footprint. Being a stalwart in delivering high ROI, the EV-SA’s design philosophy embodies the saying “small but strong”. Driven to optimize energy consumption without compromising on output, it stands as a testimony to EBARA’s commitment to blending efficiency with performance.

Economical Operation: Your Gateway to High Profitability

Engendering the lowest energy consumption in its class, the EV-SA dry vacuum pump positions itself as a leader in efficiency. The underlying mechanism aims at substantial energy savings, translating to remarkably low operational costs. A potent ally in securing high profitability, the EV-SA promotes sustainable operation, carving a niche for itself in the competitive market.

No-Maintenance: A Hassle-Free Experience

In a groundbreaking move, the EV-SA requires no maintenance, promising an uninterrupted operation that ensures your focus remains where it should be — on your core business operations. The no-maintenance feature is not just about reducing downtime, but it is a strategic approach to save substantial time and resources that would otherwise be directed towards periodic upkeep, facilitating smoother workflows and enhanced productivity.

A Spectrum of Vacuum Solutions: Catering to a Wide Vacuum Range

The versatility of the EV-SA is evident in its capacity to cater to a wide vacuum range, offering a flexible solution adaptable to various light-duty applications. The expansive vacuum range that it caters to ensures that it stands as a reliable partner in different operational setups, adding a feather to its cap, making it a favored choice for a range of requirements.

The Minimalist Powerhouse

As we sum up the unique proposition brought to the table by the EV-SA dry vacuum pump, it is evident that it stands as a minimalist powerhouse in the industry. A beacon of high profitability with its minimal footprint, it promises to be an economical and maintenance-free companion in light-duty applications.

The EV-SA Dry Vacuum Pump comes forward as a compact yet potent tool, ushering in an era of high efficiency paired with robust performance. With the promise of low operational costs and a high ROI rate, the EV-SA stands tall, pledging unparalleled efficiency in a small package, all set to become the quintessential choice for businesses aiming for high returns with sustainable operation.

Success Story

Smart, clean and green.

The chemical industry profits from our integrated solution for the disposal of fluorine-containing gases through highly efficient and reliable gas abatement systems and vacuum pumps.

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