EV-SA

The analytical one

Air-Air cooled EV-SA dry vacuum pump for clean vacuum applications.

Description

The EV-SA has an excellent performance for light duty applications. The energy consumption is significantly reduced. The operation cost is very low and the footprint small. A powerful solution with high ROI rate. Small but strong.


Core Benefits

Lowest energy consumption

No maintenance

Low operation costs

Wide vacuum range

High profitability

Minimal footprint

Product Information

Application Range

light harsh

Pumping speed

1.000 – 5.000 l/min

Models

EV-SA10

EV-SA20

EV-SA30

EV-SA50

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Applications_List_Background_Bright

Applications for EV-SA

  • Lithography-Metrology
  • Physical Vapor Deposition (PVD)
  • Load lock vacuum
  • Mass spectrometres
  • Transfer
  • SEM

Success Story

Smart, clean and green

The chemical industry profits from our integrated solution for the disposal of fluorine-containing gases through highly efficient and reliable gas abatement systems and vacuum pumps.

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100% Peace of Mind
Best reliability in class. Best return on investment in class. 100% Peace of Mind