Description
The EV-SA has an excellent performance for light duty applications. The energy consumption is significantly reduced. The operation cost is very low and the footprint small. A powerful solution with high ROI rate. Small but strong.
Core Benefits
Product Information
Application Range
light
harsh
Pumping speed
1.600 – 5.000 l/min
Models
EV-SA20
EV-SA30
Industries
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Applications for EV-SA
- Lithography-Metrology
- Physical Vapor Deposition (PVD)
- Load Lock Vacuum
- Mass Spectrometres
- Transfer
- SEM
Success Story
Smart, clean and green.
The chemical industry profits from our integrated solution for the disposal of fluorine-containing gases through highly efficient and reliable gas abatement systems and vacuum pumps.
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