The controller

For high throughput and highly efficient temperature management.


The EMT-MK has an integrated controller and temperature management system. The compact size reduces material outgassing. Multiple interface options as well as air or water cooling are available.

Core Benefits

Ultra-high vacuum

Most energy efficient

Integrated controller

Installation in any orientation

Safety standards

Optimized hydrogen compression

Product Information

Application Range

light harsh

Pumping speed

1.650 – 4.200 l/sec







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Applications for EMT-MK

  • EUV Lithography
  • Micro-machining (MEMS)
  • CD Line Width Measurement
  • SEM/TEM Electron
  • Microscopy
  • XPS
  • Nano Technology
  • Analytical Tools

Elevate Your Manufacturing Experience with the EMT-MK Turbo Molecular Pump

Step into the future with the EMT-MK Turbo Molecular Pump, crafted to meet the stringent requirements of modern high-tech manufacturing environments. Let us unravel the distinct features that place this marvel from EBARA’s rich portfolio of Turbo Molecular Pumps a notch above the rest.

Discover Unbeatable Control and Efficiency

The EMT-MK stands tall with its integrated controller, facilitating streamlined operations with ease and precision. Coupled with the most energy-efficient temperature management system in the industry, it ensures a reduction in material’s outgassing, promising an optimized performance environment at a compact size.

Compact Design, Massive Impact

Despite its compact footprint, the EMT-MK houses a plethora of features, offering a versatile solution perfect for both emerging and established setups. Tailor your pump to meet distinct operational demands with the multiple interface options available, providing a customized solution for an array of manufacturing needs.

Cooling Options to Suit Your Needs

Beyond its core features, the EMT-MK offers cooling options to suit every requirement. Choose the standard water-cooling feature or opt for air cooling upon request, ensuring flexibility and adaptability in meeting various operational demands.

Safety and Flexibility: The EMT-MK Promise

Safety is a pivotal aspect of the EMT-MK design, adhering to strict safety standards to ensure a secure operational cycle. Furthermore, it offers the flexibility of installation in any orientation, promising optimal space utilization and a hassle-free setup process.

The Gateway to Ultra-High Vacuum Environments

Crafted to facilitate ultra-high vacuum conditions, the EMT-MK is your gateway to controlled and clean environments, crucial in manufacturing high-precision products. Its energy-efficient temperature management system promises reduced operational costs while maintaining the highest standards of efficiency.

Choose the EMT-MK: The Future of Precision and Efficiency

Experience the future of manufacturing with the EMT-MK Turbo Molecular Pump, a tool where meticulous engineering meets unparalleled performance. Discover more by exploring EBARA’s expansive range of Turbo Molecular Pumps, inviting innovation and efficiency into your manufacturing setup.

Success Story

Efficient, smart and green.

Vaccum solutions for coating systems to produce ultra-thin modules for solar energy.

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