Description
The EMT-MK has an integrated controller and temperature management system. The compact size reduces material outgassing. Multiple interface options as well as air or water cooling are available.
Core Benefits
Product Information
Application Range
light
harsh
Pumping speed
1.650 – 4.200 l/sec
Models
EMT1700MK
EMT2200MK
EMT3300MK
EMT3800MK
EMT4200MK
Industries
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Applications for EMT-MK
- EUV Lithography
- Micro-machining (MEMS)
- CD Line Width Measurement
- SEM/TEM Electron
- Microscopy
- XPS
- Nano Technology
- Analytical Tools
Success Story
Efficient, smart and green.
Vaccum solutions for coating systems to produce ultra-thin modules for solar energy.
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