EMT-MK

The controller

For high throughput and highly efficient temperature management

Description

The EMT-MK has an integrated controller and temperature management system. The compact size reduces material outgassing. Multiple interface options as well as air or water cooling are available.


Core Benefits

Ultra-high vacuum

Most energy efficient

Radiation resistent

Installation in any orientation

Safety standards

Optimized hydrogen compression


Product Information

Application Range

light harsh

Pumping speed

1.650 – 4.200 l/sec

Models

EMT1700MK

EMT2200MK

EMT3300MK

EMT3400MK

EMT3800MK

EMT4200MK

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Applications for EMT-MK

  • EUV lithography
  • Micro-machining (MEMS)
  • CD line width measurement
  • SEM/TEM Electron
  • Microscopy
  • XPS
  • Nano technology
  • Analytical tools

Success Story

Smart, clean and green

The chemical industry profits from our integrated solution for the disposal of fluorine-containing gases through highly efficient and reliable gas abatement systems and vacuum pumps.

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