The high performer

For clean, reliable and vibration-free vacuum.


The EBT is a ceramic bearing turbo vacuum pump for high-tech manufacturers. The rugged mechanical bearing design is cost-effective and covers all relevant safety standards. Available with water, fan or convection cooling.

Core Benefits

High vacuum pumping

Compact design


Light gas compression

Structured for air inrush

Installation in any orientation

Product Information

Turbo molecular vacuum pump, Vakuumpumpe

Application Range

light harsh

Pumping speed

75 – 2.400 l/sec











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Applications for EBT

  • UHV
  • Analytical Systems
  • Thin Films

EBT Turbo Molecular Pump: Where Innovation Meets Efficiency

In the constantly evolving landscape of high-tech manufacturing, having reliable and efficient machinery is not just a necessity but a prerequisite for sustained success. The EBT turbo molecular pump, a state-of-the-art product crafted meticulously for the industry’s ever-growing demands, stands tall in this category. Let us delve deep into the specifics that make EBT a vanguard in its field

The Heart of the Mechanism: Ceramic Bearing Turbo Vacuum Pump

The EBT embodies sophistication and robustness, courtesy of its ceramic bearing turbo vacuum construction. Designed for high-tech manufacturers, it guarantees a performance that is both rugged and consistent, adhering to the stringent safety standards that govern the industry. Its essence lies in offering a cost-effective solution without compromising on quality, making it an indispensable tool in the contemporary manufacturing landscape.

Cooling Options Tailored for Every Requirement

Understanding the diverse needs of different operational setups, the EBT comes with versatile cooling options, including water, fan, and convection cooling systems. This feature not only provides flexibility in operations but also ensures that the pump delivers optimum performance in varied manufacturing environments, offering a tailor-made solution for every unique requirement.

A Fortress Against Air Inrush: Durable Structure

One of the standout features of the EBT turbo molecular pump is its imperviousness to air inrush, thanks to its durable structure. This ensures an uninterrupted operation, even in environments with high air influx, thereby promising stability and efficiency in the most demanding conditions. Its rugged mechanical bearing design lends it a formidable resistance against wear and tear, promising a long operational life.

Smooth Operations with Vibration-Free Functionality

In an industry where precision is paramount, the vibration-free functionality of the EBT turbo molecular pump comes as a boon. This feature ensures that the pump operates without causing disturbances, facilitating smooth and silent functioning that is pivotal in maintaining the sanctity of high-tech manufacturing environments.

Installation Flexibility: Any Orientation, Any Setup

Adding to its roster of remarkable features is the EBT’s flexibility in installation. The pump can be installed in any orientation, a testimony to its versatile design accommodating diverse operational setups with ease. This means you have a pump that seamlessly integrates into your existing systems, ready to mould itself to the unique demands of your operational landscape.

Explore More with EBARA

As you set out to find the pump that is tailored to meet your high vacuum pumping requirements, we invite you to delve deeper into the detailed specifications and features of the EBT turbo molecular pump on EBARA’s dedicated page. It’s not just a gateway to a product; it is an entrance to a world where technology meets reliability, promising a companion that will stand the test of time in your journey towards manufacturing excellence.

Through the EBT turbo molecular pump, you are not just getting a product, but securing a partnership with technology built on the foundation of expertise and innovation, a true hallmark of EBARA’s commitment to pushing the boundaries of what is possible in high-tech manufacturing.

Success Story

Smart, clean and green.

The chemical industry profits from our integrated solution for the disposal of fluorine-containing gases through highly efficient and reliable gas abatement systems and vacuum pumps.

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100% Peace of Mind
Best reliability in class. Best return on investment in class. 100% Peace of Mind