The high speed

Water-cooled EST dry vacuum pump for powdery, corrosive applications.


The EST qualifies for harsh applications generating reactive chemical by-products. It manages large gas loads and enhanced powdery by-products. The compact design allows for increased operating temperatures and corrosion resistant material.

Core Benefits

Manage hot gas temperature

High gas load stability

Flexible gas throughput

Product Information

Dry vacuum pump harsh duties

Application Range

light harsh

Pumping speed

1.000 – 50.000 l/min








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Applications for EST

  • Atomic Layer Deposition (ALD)
  • Rapid Thermal Processing (RTP)
  • Low Pressure Chemical Vapour Deposition (LPCVD)

The EST Dry Vacuum Pump: Your Robust Partner for Harsh Environments

The EST dry vacuum pump — a force to be reckoned with in handling tough applications involving reactive chemical by-products. Delve deeper to explore the standout features and benefits that this master piece from EBARA Precision Machinery Europe (EPME) brings to the table.

Navigating High-Temperature Operations with Ease

In the dynamic industrial landscape where high operating temperatures are a common phenomenon, having a reliable companion like the EST dry vacuum pump can be a game-changer. Crafted meticulously with corrosion-resistant materials, the EST showcases a phenomenal tolerance to high temperatures, ensuring a long and fruitful service life in the toughest environments. The resilience it offers against wear and tear positions it as a trusted ally in operations demanding high thermal stability.

Unprecedented Stability with High Gas Loading

When it comes to managing high gas loads, the EST stands unchallenged in the dry vacuum pump category. It guarantees high gas loading stability, a feature pivotal in maintaining the continuous and uninterrupted operation of industrial processes. The EST promises to mitigate the challenges posed by high gas loads, rendering a stable and harmonious operational environment.

Flexibility in Gas Throughput: Adaptability at Its Best

In a sector where adaptability is key, the EST goes a step further by offering flexible gas throughput, a feature designed to enhance its compatibility with various industrial settings. Whether it is accommodating changes in the process parameters or adjusting to the different gas volumes, the EST showcases a remarkable versatility, adapting seamlessly to the evolving needs of the industrial landscape.

A Compact Marvel with Enhanced Handling of Powdery By-Products

Beyond its robustness in handling gases, the EST displays an unparalleled proficiency in managing powdery by-products — a common yet challenging aspect in harsh applications. Its compact design not only facilitates easy installation and integration into various system configurations but also aids in efficient handling of powdery substances, ensuring a clean and safe operational environment.

EST: Synonymous with Advanced Technology and Durability

EST dry vacuum pump stands tall as a product representing the pinnacle of advanced technology, brought to life by EBARA, a global leader in vacuum and semiconductor systems. While bearing the hallmark of quality and durability that defines EBARA’s creations, the EST focuses on fulfilling the specific demands of harsh applications, promising a performance that is both reliable and efficient.

Success Story

Smart, clean and green.

The chemical industry profits from our integrated solution for the disposal of fluorine-containing gases through highly efficient and reliable gas abatement systems and vacuum pumps.

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