EST

The high speed

Water-cooled EST dry vacuum pump for powdery, corrosive applications

Description

The EST qualifies for harsh applications generating reactive chemical by-products. It manages large gas loads and enhanced powdery by-products. The compact design allows for increased operating temperatures and corrosion resistant material.


Core Benefits

Manage hot gas temperature

High gas load stability

Flexible gas throughput


Product Information

Application Range

light harsh

Pumping speed

1.000 – 50.000 l/min

Models

EST10N

EST25N

EST100WN

EST200WN

EST300WN

EST500WN

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Applications_List_Background_Bright

Applications for EST

  • Atomic Layer Deposition (ALD)
  • Rapid thermal processing (RTP)
  • Low Pressure Chemical Vapour Deposition (LPCVD)
  • HDP-CVD
  • SACVD
  • MOCVD
  • PECVD

Success Story

Smart, clean and green

The chemical industry profits from our integrated solution for the disposal of fluorine-containing gases through highly efficient and reliable gas abatement systems and vacuum pumps.

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100% Peace of Mind
Best reliability in class. Best return on investment in class. 100% Peace of Mind