The EST qualifies for harsh applications generating reactive chemical by-products. It manages large gas loads and enhanced powdery by-products. The compact design allows for increased operating temperatures and corrosion resistant material.
Do you need a quote?
Applications for EST
- Atomic Layer Deposition (ALD)
- Rapid thermal processing (RTP)
- Low Pressure Chemical Vapour Deposition (LPCVD)
Smart, clean and green
The chemical industry profits from our integrated solution for the disposal of fluorine-containing gases through highly efficient and reliable gas abatement systems and vacuum pumps.Read More