Compact. Resistent. Powerful.
Magnetic levitated and ceramic bearing turbo pumps for high-tech semiconductor manufacturing. Air or water-cooled up to ultra-high vacuum requirements.
Turbo Molecular Pumps for High Tech Applications
Find the right Turbo Molecular Pump for your application.
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Ashing Atomic Layer Deposition (ALD) Chemical Vapor Deposition (CVD) Diffusion Epitaxy Etch Processes Ion Implant Lithography-Metrology Load Lock Vacuum Micro Machining (MEMS) Physical Vapor Deposition (PVD) Rapid Thermal Processing (RTP) Residual Gas Analysis Silicium Technology Sputtering Surface Analysis |
Coating Flat Panel Display (FDP) Industry Leak Detection Systems Machine Tooling Magnetic Media Medical Engineering Vacuum Drying |
Analytical Tools Electric Gravometrics Mass Spectrometres Microsopy Osmometrics XPS |
Biotechnology Elementary Particle Physics Nanotechnology Nuclear Fusion Particle Accelerator Plasma Research |
Atomic Layer Deposition (ALD) | LED Manufacturing |
Fluoroproducts Industrial Chemical Productions Oxidation of Pyrophoric Gases Special Chemistry |
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| Semiconductors | General Vacuum | Analytical Instruments | R & D | Photovoltaic | LED | Chemical Industry | |
| EMT | |||||||
| EMT-MK | |||||||
| EBT | |||||||
You can filter the components according to the industries.
Turbo Molecular Pumps (3)
EMT
Application Range
light
harsh
Pumping speed
340 – 2.400 l/sec
Industries
EMT-MK
Application Range
light
harsh
Pumping speed
1.650 – 4.200 l/sec
Industries
EBT
Application Range
light
harsh
Pumping speed
75 – 2.400 l/sec
