Turbo Molecular Pumps

Magnetic levitated, hydrocarbon-free turbo pumps for ultra-high vacuum

Compact. Resistent. Powerful.

Magnetic levitated and ceramic bearing turbo pumps for high-tech semiconductor manufacturing. Air or water-cooled up to ultra-high vacuum requirements.


Turbo Molecular Pumps for high tech applications.

Find the right Turbo Molecular Pump for your application.

Ashing
Atomic Layer Deposition (ALD)
Chemical Vapor Deposition (CVD)
Diffusion
Epitaxy
Etch processes
Ion implant
Lithography-Metrology
Load lock vacuum
Micro Machining (MEMS)
Physical Vapor Deposition (PVD)
Rapid thermal processing (RTP)
Residual gas analysis
Silicium technology
Sputtering
Surface analysis
Coating
Flat Panel Display (FDP)
Industry
Leak detection systems
Machine tooling
Magnetic media
Medical engineering
Vacuum drying
Analytical tools
Electric gravometrics
Mass spectrometres
Microsopy
Osmometrics
XPS
Biotechnology
Elementary particle physics
Nanotechnology
Nuclear fusion
Particle accelerator
Plasma research
Atomic layer deposition (ALD) LED Manufacturing Fluoroproducts
Industrial chemical productions
Oxidation of pyrophoric gases
Special chemistry
Semiconductors General Vacuum Analytical Instruments R & D Photovoltaic LED Chemical Industry
EMT
EMT-MK
EBT

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