
Compact. Resistent. Powerful.
Magnetic levitated and ceramic bearing turbo pumps for high-tech semiconductor manufacturing. Air or water-cooled up to ultra-high vacuum requirements.
Turbo Molecular Pumps for High Tech Applications
Find the right Turbo Molecular Pump for your application.
Ashing Atomic Layer Deposition (ALD) Chemical Vapor Deposition (CVD) Diffusion Epitaxy Etch Processes Ion Implant Lithography-Metrology Load Lock Vacuum Micro Machining (MEMS) Physical Vapor Deposition (PVD) Rapid Thermal Processing (RTP) Residual Gas Analysis Silicium Technology Sputtering Surface Analysis |
Coating Flat Panel Display (FDP) Industry Leak Detection Systems Machine Tooling Magnetic Media Medical Engineering Vacuum Drying |
Analytical Tools Electric Gravometrics Mass Spectrometres Microsopy Osmometrics XPS |
Biotechnology Elementary Particle Physics Nanotechnology Nuclear Fusion Particle Accelerator Plasma Research |
Atomic Layer Deposition (ALD) | LED Manufacturing |
Fluoroproducts Industrial Chemical Productions Oxidation of Pyrophoric Gases Special Chemistry |
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Semiconductors | General Vacuum | Analytical Instruments | R & D | Photovoltaic | LED | Chemical Industry | |
EMT | |||||||
EMT-MK | |||||||
EBT |
You can filter the components according to the industries.
Turbo Molecular Pumps (3)
EMT

Application Range
light
harsh
Pumping speed
340 – 2.400 l/sec
Industries
EMT-MK

Application Range
light
harsh
Pumping speed
1.650 – 4.200 l/sec
Industries
EBT

Application Range
light
harsh
Pumping speed
75 – 2.400 l/sec