EV-M

The strong & flexible

Water cooled EV-M for harsh processes and reduced emissions

Description

The EV-M with its multi-stage lobe design is best used for harsh duty applications. It has a higher H2 pumping speed compared to screw type vacuum pumps. The idle mode provides additional energy savings. The EV-M is powerful with low energy demands.


Core Benefits

High energy savings

At point heating

Multi-stage lobe design

High flexibility

Intelligent control system

Fab space saving

Product Information

Application Range

light harsh

Pumping speed

108 – 110.000 l/min

Models

EV-M20N

EV-M102N

EV-M202N

EV-M302N

EV-M502N

EV-M802N

EV-M1202N

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Applications for EV-M

  • Atomic Layer Deposition (ALD)
  • Rapid thermal processing (RTP)
  • Low Pressure Chemical Vapour Deposition (LPCVD)
  • HDP-CVD
  • SACVD
  • MOCVD
  • PECVD

Success Story

Smart, clean and green

The chemical industry profits from our integrated solution for the disposal of fluorine-containing gases through highly efficient and reliable gas abatement systems and vacuum pumps.

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All with one – integrated solution?

100% Peace of Mind
Best reliability in class. Best return on investment in class. 100% Peace of Mind