Description
The EV-M with its multi-stage lobe design is best used for harsh duty applications. It has a higher H2 pumping speed compared to screw type vacuum pumps. The idle mode provides additional energy savings. The EV-M is powerful with low energy demands.
Core Benefits
Product Information
Application Range
light
harsh
Pumping speed
108 – 110.000 l/min
Models
EV-M20N
EV-M102N
EV-M202N
EV-M302N
EV-M502N
EV-M802N
EV-M1202N
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Applications for EV-M
- Atomic Layer Deposition (ALD)
- Rapid Thermal Processing (RTP)
- Low Pressure Chemical Vapour Deposition (LPCVD)
- HDP-CVD
- SACVD
- MOCVD
- PECVD
Success Story
Smart, clean and green.
The chemical industry profits from our integrated solution for the disposal of fluorine-containing gases through highly efficient and reliable gas abatement systems and vacuum pumps.
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