The strong & flexible

Water-cooled EV-M for harsh processes and reduced emissions.


The EV-M with its multi-stage lobe design is best used for harsh duty applications. It has a higher H2 pumping speed compared to screw type vacuum pumps. The idle mode provides additional energy savings. The EV-M is powerful with low energy demands.

Core Benefits

High energy savings

At point heating

Multi-stage lobe design

High flexibility

Intelligent control system

Fab space saving

Product Information

Dry vacuum pump

Application Range

light harsh

Pumping speed

108 – 110.000 l/min









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Applications for EV-M

  • Atomic Layer Deposition (ALD)
  • Rapid Thermal Processing (RTP)
  • Low Pressure Chemical Vapour Deposition (LPCVD)

Discover the Evolved Engineering of the EV-M Dry Vacuum Pump

In the ever-evolving landscape of semiconductor and vacuum system manufacturing, standing steadfast and pioneering is the EV-M dry vacuum pump, a hallmark creation by the global leader, EBARA. Designed to champion harsh duty applications, the EV-M encapsulates a multi-stage lobe design that sets it apart in the industry. Let us traverse the key features and benefits that make the EV-M a linchpin in the dry vacuum pumps category.

Superior Design Meeting Unprecedented Challenges

With its multi-stage lobe design, the EV-M is engineered to excel in environments demanding high resilience and endurance. This design facilitates a higher H₂ pumping speed compared to its screw type counterparts, bringing forth a remarkable throughput and a performance optimized for harsh duty applications, whether it is in the production of solar cells, liquid crystals, or wafers.

An Epitome of Energy Efficiency

Harnessing the power of intelligent control systems, the EV-M goes a step further by introducing an idle mode, thus encouraging significant energy savings. This feature ensures that the pump operates with minimal energy demands, redefining efficiency in the operational dynamics of dry vacuum pumps.

Flexible Operation Coupled with At-Point Heating

Flexibility is ingrained in the very essence of EV-M’s design. Its intelligent control system adeptly manages the pump’s operations, while the at-point heating functionality ensures a precise, controlled environment, meeting the rigorous demands of a diverse set of applications.

Compact Design, Expansive Possibilities

In line with the contemporary needs for space optimization, the EV-M promises a small footprint without compromising on its functionality, thus saving considerable fab space. This thoughtful design approach means that it can integrate seamlessly into various setups, meeting complex demands while promoting space efficiency.

Success Story

Smart, clean and green.

The chemical industry profits from our integrated solution for the disposal of fluorine-containing gases through highly efficient and reliable gas abatement systems and vacuum pumps.

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All-in-one integrated solution?

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Best reliability in class. Best return on investment in class. 100% Peace of Mind